High LIDT mirrors for 355nm wavelength based on combined ion beam sputtering and glancing angle deposition technique

G. Abromavičius; L. Grinevičiūtė; R. Buzelis; S. Kičas; A. Melninkaitis; E. Pupka; T. Tolenis

doi:10.1117/12.2280596

13 November 2017 High LIDT mirrors for 355nm wavelength based on combined ion beam sputtering and glancing angle deposition technique

G. Abromavičius, L. Grinevičiūtė, R. Buzelis, S. Kičas, A. Melninkaitis, E. Pupka, T. Tolenis

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Proceedings Volume 10447, Laser-Induced Damage in Optical Materials 2017; 1044728 (2017) https://doi.org/10.1117/12.2280596
Event: SPIE Laser Damage, 2017, Boulder, Colorado, United States

Abstract

Laser induced damage of optical coatings has been one of the most important targets during many decades of intensive research. Different techniques were used and explored with the aim to increase the resistance of multilayer systems to laser pulses. In this work, LIDT results of different “base” structures made by ion beam sputtering of Al₂O₃, SiO₂ and their mixtures are presented, and further enhancement possibilities are discussed by applying additional layer structure using higher bandgap material – fluorides and glancing angle deposited SiO₂.

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G. Abromavičius, L. Grinevičiūtė, R. Buzelis, S. Kičas, A. Melninkaitis, E. Pupka, and T. Tolenis "High LIDT mirrors for 355nm wavelength based on combined ion beam sputtering and glancing angle deposition technique", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044728 (13 November 2017); https://doi.org/10.1117/12.2280596

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