Presentation
12 October 2021 Impact of film densification on UV-ns laser damage performance for MLD coatings
Author Affiliations +
Abstract
We compare the 355 nm, 45º AOI p-pol 8 n-s laser damage performance of standing-wave hafnia single layers fabricated using argon and xenon as working gas. A suite of metrology tools has been employed to understand the structural, chemical and paramagnetic defect states in the two films. The resultant films from the xenon deposition process are highly dense and have high 3w laser damage performance.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Colin M. Harthcock, S. Roger Qiu, Paul B. Mirkarimi, Thomas Voisin, Christopher Colla, Harris Mason, Raluca Negres, Gabe Guss, Devika Vipin, and Mengbing Huang "Impact of film densification on UV-ns laser damage performance for MLD coatings", Proc. SPIE 11910, Laser-Induced Damage in Optical Materials 2021, 119100X (12 October 2021); https://doi.org/10.1117/12.2600525
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KEYWORDS
Xenon

Ion beams

Sputter deposition

Argon

Hafnium

Laser induced damage

Metals

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