Measurement of through-focus EUV pattern shifts using the SHARP actinic microscope

Obert Wood II; Yulu Chen; Pawitter Mangat; Kenneth Goldberg; Markus Benk; Bryan Kasprowicz; Henry Kamberian; Jeremy McCord; Thomas Wallow

doi:10.1117/12.2280371

16 October 2017 Measurement of through-focus EUV pattern shifts using the SHARP actinic microscope

Obert Wood II, Yulu Chen, Pawitter Mangat, Kenneth Goldberg, Markus Benk, Bryan Kasprowicz, Henry Kamberian, Jeremy McCord, Thomas Wallow

Author Affiliations +

Proceedings Volume 10450, International Conference on Extreme Ultraviolet Lithography 2017; 1045008 (2017) https://doi.org/10.1117/12.2280371
Event: SPIE Photomask Technology and EUV Lithography, 2017, Monterey, California, United States

Abstract

This paper provides experimental measurements of through-focus pattern shifts between contact holes in a dense array and a surrounding pattern of lines and spaces using the SHARP actinic microscope in Berkeley. Experimental values for pattern shift in EUV lithography due to 3D mask effects are extracted from SHARP microscope images and benchmarked with pattern shift values determined by rigorous simulations.

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Obert Wood II, Yulu Chen, Pawitter Mangat, Kenneth Goldberg, Markus Benk, Bryan Kasprowicz, Henry Kamberian, Jeremy McCord, and Thomas Wallow "Measurement of through-focus EUV pattern shifts using the SHARP actinic microscope", Proc. SPIE 10450, International Conference on Extreme Ultraviolet Lithography 2017, 1045008 (16 October 2017); https://doi.org/10.1117/12.2280371

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