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There is a long history of non-contact profilometry of mirrors performed using an autocollimator. An autocollimator is scanned over a mirror resulting in a set of local slope measurements that are then integrated to produce a measurement of the mirror profile. Such profilometers are often associated with the testing of x-ray optics. In this application a small beam is usually created by placing an aperture near the mirror under test. The W2-AM uses a reticle with a circular target. The noise, sensitivity and error characteristics of the W2-AM instrument is assessed relative to the needs of profilometry of x-ray optics.
William P. Kuhn
"Assessing the W2-AM for use in profiling x-ray optics", Proc. SPIE 10747, Optical System Alignment, Tolerancing, and Verification XII, 107470C (19 September 2018); https://doi.org/10.1117/12.2323280
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William P. Kuhn, "Assessing the W2-AM for use in profiling x-ray optics," Proc. SPIE 10747, Optical System Alignment, Tolerancing, and Verification XII, 107470C (19 September 2018); https://doi.org/10.1117/12.2323280