Design and technology of titanium comb capacitor

D. Zarzeczny; M. Szypulski; T. Lizak; K. Muzyka; A. Kociubiński; M. Prendecka; T. Małecka-Massalska

doi:10.1117/12.2501551

1 October 2018 Design and technology of titanium comb capacitor

D. Zarzeczny, M. Szypulski, T. Lizak, K. Muzyka, A. Kociubiński, M. Prendecka, T. Małecka-Massalska

Proceedings Volume 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018; 1080857 (2018) https://doi.org/10.1117/12.2501551
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 2018, Wilga, Poland

Abstract

This paper presents issues related to the creation of research plates with titanium electrodes, which are a new alternative to currently used plates with gold electrodes. Methods for obtaining metallization of titanium, necessary for the production of electrodes are described. Various lithography techniques are presented for processing the obtained layer of the material. The stages of designing and manufacturing comb capacitors and ready-made research plates have been presented. Finally, substrates with a titanium layer have been designed and manufactured to allow the impedance of living cells to be measured.

Citation Download Citation

D. Zarzeczny, M. Szypulski, T. Lizak, K. Muzyka, A. Kociubiński, M. Prendecka, and T. Małecka-Massalska "Design and technology of titanium comb capacitor ", Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 1080857 (1 October 2018); https://doi.org/10.1117/12.2501551

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Titanium

Electrodes

Resistance

Capacitors

Optical lithography

Analytical research

Microelectromechanical systems

Show All Keywords

Keywords/Phrases

Search In:

Publication Years