Design and technology of copper comb capacitors

M. Szypulski; D. Zarzeczny; T. Lizak; K. Muzyka; A. Kociubiński; M. Prendecka; T. Małecka-Massalska

doi:10.1117/12.2501736

1 October 2018 Design and technology of copper comb capacitors

M. Szypulski, D. Zarzeczny, T. Lizak, K. Muzyka, A. Kociubiński, M. Prendecka, T. Małecka-Massalska

Proceedings Volume 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018; 108085N (2018) https://doi.org/10.1117/12.2501736
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 2018, Wilga, Poland

Abstract

The article presents the construction and technology of comb capacitors on a polycarbonate substrates. The structures have been designed to be used in the ECIS measurement system that allows monitoring the activity of the examined cells by analyzing the changing electrical parameters impedance, resistance and capacitance in real time. The copper layer was embedded by sputtering method. The resulting comb capacitors were used in a test sample of substances with different chemical properties.

Citation Download Citation

M. Szypulski, D. Zarzeczny, T. Lizak, K. Muzyka, A. Kociubiński, M. Prendecka, and T. Małecka-Massalska "Design and technology of copper comb capacitors", Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 108085N (1 October 2018); https://doi.org/10.1117/12.2501736

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