Deformation measurements using a stereo microscope

Wei-Hung Su; Yu-Heng Lo

doi:10.1117/12.2530711

9 September 2019 Deformation measurements using a stereo microscope

Wei-Hung Su, Yu-Heng Lo

Proceedings Volume 11123, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications XIII; 111230T (2019) https://doi.org/10.1117/12.2530711
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

A fringe projection technique embedded into a stereo microscope to perform 3D deformation measurements is presented. Fringes projected on the inspected object are blurred by motion, providing additional information to describe the surface deformation. In conjunction to a stereo microscope, to inspect the deformation of micro-objects is available. Only oneshot measurement is required. The full-field property makes it possible to inspect several objects at the same time.

Citation Download Citation

Wei-Hung Su and Yu-Heng Lo "Deformation measurements using a stereo microscope", Proc. SPIE 11123, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications XIII, 111230T (9 September 2019); https://doi.org/10.1117/12.2530711

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