In-situ absolute measurement method for reference surface error of large aperture interferometer based on oblique incidence

You Zhou; Shijie Liu; Yunbo Bai; Longbo Xu; Jianda Shao

doi:10.1117/12.2547402

20 December 2019 In-situ absolute measurement method for reference surface error of large aperture interferometer based on oblique incidence

You Zhou, Shijie Liu, Yunbo Bai, Longbo Xu, Jianda Shao

Author Affiliations +

Proceedings Volume 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019); 112091K (2019) https://doi.org/10.1117/12.2547402
Event: Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019, Xi'an, China

Abstract

Existing absolute measurement methods are difficult to avoid the replacement and rotation of the large aperture interferometer’s reference flat, and it is impossible to achieve in-situ absolute measurement on the basis of keeping the reference flat of the interferometer not rotating and replacing each other. In this paper, a test method based on oblique incidence is practically implemented in the interferometric measurement process, and an auxiliary rotating device for large aperture flat is designed. Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and one oblique incidence measurement. An iterative algorithm is applied to retrieve the absolute surface shape of the test flat. The absolute measurement experiment is carried out on the 600-mm aperture interferometer produced by Zygo. The experimental results show that the absolute surface error of the reference flat measured according to the proposed method is 2.0 nm (RMS), differing from the absolute measurement results based on the Zygo approach.

Citation Download Citation

You Zhou, Shijie Liu, Yunbo Bai, Longbo Xu, and Jianda Shao "In-situ absolute measurement method for reference surface error of large aperture interferometer based on oblique incidence", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112091K (20 December 2019); https://doi.org/10.1117/12.2547402

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KEYWORDS

Interferometers

Wavefronts

Surface finishing

Interferometry

Optical components

Optical testing

Fizeau interferometers

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