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We studied the four-wave mixing in photonic waveguides including crystal silicon waveguide, amorphous silicon waveguide, and silicon nitride microring resonator. The devices were fabricated by using electron-beam lithography and inductively coupled plasma etching technologies. The spectra of four-wave mixing process were measured by using the optical spectrum analyzer. The pump power dependences of the conversion efficiencies were analyzed according to the measured spectra. The amorphous silicon waveguide works more efficient than the crystal silicon waveguide. Silicon nitride microring resonator enhanced the conversion efficiency effectively by about 8.0 dB.
Jianxun Hong,Yixiao Hong,Xian Lin,Zhirong Tan,Weidong Hu, andHua Ge
"Four-wave mixing in integrated photonic waveguides", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112092N (20 December 2019); https://doi.org/10.1117/12.2548518
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