Fabrication of multichannel Bloch long-range surface plasmon biosensors

Maryam Khodami; Zohreh Hirbodvash; Oleksiy Krupin; Ewa Lisicka-Skrzek; Anthony Olivieri; Howard Northfield; Pierre Berini

doi:10.1117/12.2545106

25 February 2020 Fabrication of multichannel Bloch long-range surface plasmon biosensors

Maryam Khodami, Zohreh Hirbodvash, Oleksiy Krupin, Ewa Lisicka-Skrzek, Anthony Olivieri, Howard Northfield, Pierre Berini

Author Affiliations +

Proceedings Volume 11283, Integrated Optics: Devices, Materials, and Technologies XXIV; 112831E (2020) https://doi.org/10.1117/12.2545106
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

The fabrication of a novel optical biosensor based on Bloch long-range surface plasmons on waveguide arrays is presented in this work. The structures are fabricated on a truncated 1D photonic crystal comprised of a 12 period stack of alternating layers of SiO₂/Ta₂O₅. The Au waveguides, are fabricated using a bi-layer lift-off photolithography process including LOR 1A and SPR 955. Grating couplers, as the input/output means, are fabricated using overlaid electronbeam lithography involving a bilayer PMMA process. The planar waveguides are integrated into arrays capable of multichannel multimodal biosensing. The wafer is covered with CYTOP as the upper cladding with etched microfluidic channels, and wafer-bonded to a borofloat silica wafer to encapsulate the fluidic channels and enable side fluidic interfaces.

Citation Download Citation

Maryam Khodami, Zohreh Hirbodvash, Oleksiy Krupin, Ewa Lisicka-Skrzek, Anthony Olivieri, Howard Northfield, and Pierre Berini "Fabrication of multichannel Bloch long-range surface plasmon biosensors", Proc. SPIE 11283, Integrated Optics: Devices, Materials, and Technologies XXIV, 112831E (25 February 2020); https://doi.org/10.1117/12.2545106

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