Paper
18 December 2019 InGaN/GaN MQWs green-light photodetectors with thin GaN barrier layers
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Abstract
Green light InGaN photodiodes based on 21-periods In0.31Ga0.69N/GaN MQWs with 6-nm-thick barriers were fabricated and characterized. The fabricated devices show a spectral response cutoff of more than three orders of magnitude by 540 nm. Dark current as low as 2.65×10-14 A was measured at 5 V reverse bias. Responsivity of 69.0 mA/W was obtained at ~490 nm and -5 V bias under the back illumination condition, corresponding to an external quantum efficiency of 12.8 %.
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Supeng Zhang, Hongxia Wang, Hailong Wang, and Hao Jiang "InGaN/GaN MQWs green-light photodetectors with thin GaN barrier layers", Proc. SPIE 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications, 1133403 (18 December 2019); https://doi.org/10.1117/12.2539045
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KEYWORDS
Indium gallium nitride

Gallium nitride

Palladium

Quantum wells

Photodetectors

Absorption

Annealing

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