Single nanoparticle detection in the far field by nonlinear optical method

EunHee Jeang; Boris Afinogenov; Sangwoo Bae; TaeHyun Kim; Ingi Kim; Kyunghun Han; Akinori Ohkubo; SangMin Lee; MinHwan Seo; Seulgi Lee; Wondon Joo; Hosun Yoo; Anton Medvedev; Aleksandr Shorokhov; Anton Sofronov; Maksim Riabko; Vladimir Bessonov; Ilya Antropov

doi:10.1117/12.2552708

1 April 2020 Single nanoparticle detection in the far field by nonlinear optical method

EunHee Jeang, Boris Afinogenov, Sangwoo Bae, TaeHyun Kim, Ingi Kim, Kyunghun Han, Akinori Ohkubo, SangMin Lee, MinHwan Seo, Seulgi Lee, Wondon Joo, Hosun Yoo, Anton Medvedev, Aleksandr Shorokhov, Anton Sofronov, Maksim Riabko, Vladimir Bessonov, Ilya Antropov

Author Affiliations +

Proceedings Volume 11358, Nonlinear Optics and its Applications 2020; 1135802 (2020) https://doi.org/10.1117/12.2552708
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

Detection of a single nanoparticle on a bare silicon wafer has been a challenge in the semiconductor industry for decades. Currently, the most successful and widely used technique is dark-field microscopy. However, it is not capable of detecting single sub-10 nm particles owing to a low signal-to-noise ratio (SNR). As a new approach, we suggest using the second harmonic generation (SHG) to detect a single nanoparticle. The second harmonic generation in centrosymmetric materials, like silicon, is forbidden except for a thin and additionally increase local field factors, allowing for their persistent detection. Choosing the proper surface and increasing SNR. We demonstrate the feasibility of the nonlinear dark-field microscopy concept by detecting an isolated 80-nm silicon nanoparticle on the silicon wafer.

Conference Presentation

Citation Download Citation

EunHee Jeang, Boris Afinogenov, Sangwoo Bae, TaeHyun Kim, Ingi Kim, Kyunghun Han, Akinori Ohkubo, SangMin Lee, MinHwan Seo, Seulgi Lee, Wondon Joo, Hosun Yoo, Anton Medvedev, Aleksandr Shorokhov, Anton Sofronov, Maksim Riabko, Vladimir Bessonov, and Ilya Antropov "Single nanoparticle detection in the far field by nonlinear optical method", Proc. SPIE 11358, Nonlinear Optics and its Applications 2020, 1135802 (1 April 2020); https://doi.org/10.1117/12.2552708

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available