Micro-vibration calibration system based on laser Doppler

Yuan Long; Caizhi Yu; Yue Li; Peng Wang

doi:10.1117/12.2540477

12 March 2020 Micro-vibration calibration system based on laser Doppler

Yuan Long, Caizhi Yu, Yue Li, Peng Wang

Proceedings Volume 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 1143905 (2020) https://doi.org/10.1117/12.2540477
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China

Abstract

In modern society, the measurement of low-frequency micro-vibration has received more and more attention. Highprecision piezoelectric acceleration sensors are often used to measure small vibrations of objects. Therefore, the calibration of such high precision piezoelectric accelerometers is particularly important. The high-precison piezoelectric sensor, however, cannot be calibrated by a general calibration system since it has its own high measurement accuracy and the attenuation frequency is low frequency. This paper implements a low-frequency micro-vibration acceleration sensor calibration system based on non-contact laser measurement, which can calibrate high-precision piezoelectric sensors and accurately measure the sensor under low-frequency conditions. First, the high sensitivity of the heterodyne laser interferometer in the case of small amplitude can be used to calibrate the high-precision sensor in the case of 10^-7 g . Secondly, for the calibration of low-frequency sensors, the cantilever structure can effectively calibrate the acceleration sensor at an attenuation frequency of about 0.5 Hz, which improves the calibration range and calibration sensitivity of the calibration system.

Citation Download Citation

Yuan Long, Caizhi Yu, Yue Li, and Peng Wang "Micro-vibration calibration system based on laser Doppler", Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 1143905 (12 March 2020); https://doi.org/10.1117/12.2540477

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KEYWORDS

Calibration

Sensors

Doppler effect

Sensor calibration

Laser applications

Signal processing

Beam splitters

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