Mr. Caizhi Yu Profile

Caizhi Yu

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Proceedings Article | 12 March 2020 Paper

Micro-vibration calibration system based on laser Doppler

Yuan Long, Caizhi Yu, Yue Li, Peng Wang

Proceedings Volume 11439, 1143905 (2020) https://doi.org/10.1117/12.2540477

KEYWORDS: Calibration, Sensors, Doppler effect, Sensor calibration, Laser applications, Signal processing, Beam splitters, Photodetectors, Interference (communication), Error analysis

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In modern society, the measurement of low-frequency micro-vibration has received more and more attention. Highprecision piezoelectric acceleration sensors are often used to measure small vibrations of objects. Therefore, the calibration of such high precision piezoelectric accelerometers is particularly important. The high-precison piezoelectric sensor, however, cannot be calibrated by a general calibration system since it has its own high measurement accuracy and the attenuation frequency is low frequency. This paper implements a low-frequency micro-vibration acceleration sensor calibration system based on non-contact laser measurement, which can calibrate high-precision piezoelectric sensors and accurately measure the sensor under low-frequency conditions. First, the high sensitivity of the heterodyne laser interferometer in the case of small amplitude can be used to calibrate the high-precision sensor in the case of 10^-7 g . Secondly, for the calibration of low-frequency sensors, the cantilever structure can effectively calibrate the acceleration sensor at an attenuation frequency of about 0.5 Hz, which improves the calibration range and calibration sensitivity of the calibration system.

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