High precision free-form optics and application to soft x-ray mirrors

T. Kume; K. Hiraguri; Y. Imamura; H. Miyashita; T. Mukoda; Y. Matsuzawa; Y. Takeo; Y. Senba; H. Kishimoto; H. Ohashi; H. Mimura; H. Hashizume

doi:10.1117/12.2568909

4 September 2020 High precision free-form optics and application to soft x-ray mirrors

T. Kume, K. Hiraguri, Y. Imamura, H. Miyashita, T. Mukoda, Y. Matsuzawa, Y. Takeo, Y. Senba, H. Kishimoto, H. Ohashi, H. Mimura, H. Hashizume

Author Affiliations +

Proceedings Volume 11491, Advances in X-Ray/EUV Optics and Components XV; 114910G (2020) https://doi.org/10.1117/12.2568909
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

High-end precision optics are generally manufactured through traditional processes, which produce unique shapes and smooth surfaces, and the modern figure correction process. Particularly for soft x-ray regions, the demand for accurate free-form optics with complex and steep shapes has been increasing recently. Wolter mirrors and ring-focusing mirrors are representative of these types of optics, which are expected to be the next-generation devices for soft x-ray microscopy. To fabricate these mirrors with sufficient accuracy to achieve ideal optical performances, both traditional and modern processes must be optimized ad hoc. In this study, we apply the high-precision lens fabrication process to a monolithic Wolter mirror and a ring-focusing mirror. The surface measurement results of the mirrors suggest that it is possible to fabricate single-nanometer accurate soft x-ray mirrors with steep shapes in complex geometries.

Conference Presentation

Citation Download Citation

T. Kume, K. Hiraguri, Y. Imamura, H. Miyashita, T. Mukoda, Y. Matsuzawa, Y. Takeo, Y. Senba, H. Kishimoto, H. Ohashi, H. Mimura, and H. Hashizume "High precision free-form optics and application to soft x-ray mirrors", Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 114910G (4 September 2020); https://doi.org/10.1117/12.2568909

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available