Prof. Hidekazu Mimura Profile

Prof. Hidekazu Mimura

Professor at Univ of Tokyo

SPIE Involvement:

Conference Chair | Editor | Author

Publications (69)

Proceedings Article | 8 October 2024 Presentation + Paper

Development of figure correction system for Wolter mirror for x-ray telescopes

Shutaro Mohri, Shunsuke Ito, Satoru Egawa, Hiroto Motoyama, Jianli Guo, Gota Yamaguchi, Takehiro Kume, Yusuke Matsuzawa, Hidekazu Takano, Yoshiki Kohmura, Hidekazu Mimura

Proceedings Volume 13150, 1315004 (2024) https://doi.org/10.1117/12.3028463

KEYWORDS: Mirrors, Silicon, Nozzles, Mirror surfaces, Film thickness, Surface roughness, X-rays, Parabolic mirrors, X-ray telescopes, Particles

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Proceedings Article | 4 October 2024 Presentation + Paper

Application of steeply-curved free-form x-ray mirror fabrication process to a high-precision plane surface

T. Kume, Y. Matsuzawa, Y. Imamura, K. Hiraguri, H. Motoyama, S. Egawa, H. Mimura, H. Hashizume

Proceedings Volume 13150, 1315002 (2024) https://doi.org/10.1117/12.3028501

KEYWORDS: Mirrors, Fabrication, Mirror surfaces, X-rays, Profilometers, Surface finishing

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Proceedings Article | 4 October 2024 Presentation

Development of a combined soft x-ray and visible light microscope for observation of biological cells

Satoru Egawa, Kai Sakurai, Yoko Takeo, Kyota Yoshinaga, Shigeki Owada, Gota Yamaguchi, Shunya Yokomae, Hidekazu Mimura, Yutaka Yamagata, Makina Yabashi, Takashi Kimura, Mari Shimura

Proceedings Volume PC13150, PC1315001 (2024) https://doi.org/10.1117/12.3028505

KEYWORDS: X-rays, Microscopes, Visible radiation, X-ray imaging, X-ray microscopy, Color imaging, Windows, Visualization, Objectives, Mirrors

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Proceedings Article | 21 August 2024 Poster + Paper

Development of x-ray optics for the solar flare sounding rocket FOXSI-4: ray-tracing simulation

Yusuke Yoshida, Koki Sakuta, Kazuki Ampuku, Ryuto Fujii, Kumiko Okada, Keitoku Yoshihira, Tetsuo Kano, Naoki Ishida, Wataru Kato, Yoshitaka Inoue, Keisuke Tamura, Kikuko Miyata, Noriyuki Narukage, Gota Yamaguchi, Shunsuke Ito, Shutaro Mohri, Takehiro Kume, Yusuke Matsuzawa, Yoichi Imamura, Takahiro Saito, Kentaro Hiraguri, Hirokazu Hashizume, Hidekazu Mimura, Ikuyuki Mitsuishi

Proceedings Volume 13093, 130936W (2024) https://doi.org/10.1117/12.3018175

KEYWORDS: X-ray optics, X-rays, Solar processes, Point spread functions, Reflection, Mirrors, X-ray imaging, Parabolic mirrors, Mirror surfaces, Stray light

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Proceedings Article | 21 August 2024 Presentation + Paper

Development of x-ray optics for the solar flare sounding rocket FOXSI-4: ground calibration

Kazuki Ampuku, Koki Sakuta, Ryuto Fujii, Yusuke Yoshida, Kumiko Okada, Keitoku Yoshihira, Tetsuo Kano, Naoki Ishida, Wataru Kato, Yoshitaka Inoue, Keisuke Tamura, Kikuko Miyata, Noriyuki Narukage, Gota Yamaguchi, Shunsuke Ito, Shutaro Mohri, Takehiro Kume, Yusuke Matsuzawa, Yoichi Imamura, Takahiro Saito, Kentaro Hiraguri, Hirokazu Hashizume, Hidekazu Mimura, Ikuyuki Mitsuishi

Proceedings Volume 13093, 1309323 (2024) https://doi.org/10.1117/12.3018109

KEYWORDS: X-ray optics, X-rays, Rockets, Calibration, Solar processes, Mirrors, Solar radiation models, Point spread functions, Hard x-rays, X-ray imaging

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Proceedings Article | 21 August 2024 Poster + Paper

Development of x-ray optics for the solar flare sounding rocket FOXSI-4: vibration test

Ryuto Fujii, Koki Sakuta, Kazuki Ampuku, Yusuke Yoshida, Takashi Ito, Kumiko Okada, Keitoku Yoshihira, Tetsuo Kano, Naoki Ishida, Yoshitaka Inoue, Keisuke Tamura, Kikuko Miyata, Noriyuki Narukage, Gota Yamaguchi, Shunsuke Ito, Shutaro Mohri, Takehiro Kume, Yusuke Matsuzawa, Yoichi Imamura, Takahiro Saito, Kentaro Hiraguri, Hirokazu Hashizume, Hidekazu Mimura, Ikuyuki Mitsuishi

Proceedings Volume 13093, 130936Y (2024) https://doi.org/10.1117/12.3018685

KEYWORDS: Vibration, X-ray optics, Mirrors, X-rays, Rockets, Sensors, X-ray imaging, Fermium, Stray light, Tolerancing

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Proceedings Article | 6 October 2023 Presentation

Combining wave-optical and ray-tracing calculations in x-ray reflective optical systems

Hidekazu Mimura, Yoko Takeo, Hiroto Motoyama, Satoru Egawa, Takashi Kimura, Yasunori Senba, Takashi Tanaka, Haruhiko Ohashi

Proceedings Volume PC12697, PC1269702 (2023) https://doi.org/10.1117/12.2678528

KEYWORDS: X-rays, X-ray optics, X-ray lasers, Synchrotron radiation, Phase distribution, Partial coherence, Mirrors, Free electron lasers

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Proceedings Article | 4 October 2023 Presentation

Two-stage soft x-ray focusing system developed at BL1 of SACLA

Hiroto Motoyama, Satoru Egawa, Gota Yamaguchi, Shigeki Owada, Takashi Kimura, Makina Yabashi, Hidekazu Mimura

Proceedings Volume PC12694, PC1269408 (2023) https://doi.org/10.1117/12.2682630

KEYWORDS: X-rays, Mirrors, Signal detection, Optical properties, Signal intensity, Nonlinear optics, X-ray lasers, Signal generators, Free electron lasers

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Proceedings Article | 3 October 2023 Presentation + Paper

Development of an inner surface profile measurement system for precise electroformed Wolter mirrors for x-ray telescopes

Shunsuke Ito, Akinari Ito, Shutaro Mohri, Gota Yamaguchi, Hidekazu Mimura

Proceedings Volume 12695, 1269503 (2023) https://doi.org/10.1117/12.2675892

KEYWORDS: Mirrors, Mirror surfaces, X-ray telescopes, Silicon, Motion measurement, X-rays, Reproducibility, Nickel, X-ray optics

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Proceedings Article | 3 October 2023 Presentation + Paper

Development of a magnetron sputtering system for soft x-ray mirrors

S. Yokomae, T. Kume, Y. Matsuzawa, K. Hiraguri, H. Mimura, H. Hashizume

Proceedings Volume 12694, 1269406 (2023) https://doi.org/10.1117/12.2678878

KEYWORDS: Gold, X-rays, Mirrors, Surface roughness, Sputter deposition

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Proceedings Article | 3 October 2023 Presentation + Paper

Fabrication and surface evaluation of a high-precision monolithic mirror with complex geometry for soft x-ray focusing

T. Kume, Y. Matsuzawa, T. Saito, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Mimura, H. Hashizume

Proceedings Volume 12694, 1269408 (2023) https://doi.org/10.1117/12.2677302

KEYWORDS: Mirrors, X-rays, Fabrication

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Proceedings Article | 3 October 2023 Presentation + Paper

Development of deposition system for the inner surface of Wolter mirror for x-ray telescopes

Shutaro Mohri, Akinari Ito, Shunsuke Ito, Gota Yamaguchi, Hidekazu Mimura

Proceedings Volume 12694, 1269407 (2023) https://doi.org/10.1117/12.2676238

KEYWORDS: Silicon, Mirrors, Mirror surfaces, Film thickness, Surface roughness, Nickel, X-ray telescopes, Magnetrons, Argon, X-rays

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Proceedings Article | 4 October 2022 Presentation + Paper

Surface evaluation of high-precision monolithic mirror for soft x-ray focusing

T. Kume, Y. Matsuzawa, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Hashizume, H. Mimura

Proceedings Volume 12240, 122400G (2022) https://doi.org/10.1117/12.2633765

KEYWORDS: Mirrors, X-rays, Profilometers, Stitching interferometry

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Proceedings Article | 4 October 2022 Presentation + Paper

Design of soft x-ray fluorescence microscopy beyond 100-nm spatial resolution with ultrashort Kirkpatrick-Baez mirror

Takenori Shimamura, Yoko Takeo, Fumika Moriya, Takashi Kimura, Mari Shimura, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Kenta Shimba, Yasuhiko Jimbo, Hidekazu Mimura

Proceedings Volume 12240, 1224004 (2022) https://doi.org/10.1117/12.2632949

KEYWORDS: Silicon, X-rays, Luminescence, Mirrors, X-ray fluorescence spectroscopy, Sensors, Aluminum, Fluorine, Fluorescence spectroscopy

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Proceedings Article | 3 October 2022 Presentation

High-speed imaging of metal drilling using 100-keV X-rays at SPring-8 (Conference Presentation)

Hidekazu Mimura, Gota Yamaguchi, Keito Tamura, Hirokatsu Yumoto, Takahisa Koyam, Hidekazu Takano, Yujiro Hayashi, Makina Yabashi, Haruhiko Ohashi

Proceedings Volume PC12240, PC1224009 (2022) https://doi.org/10.1117/12.2635300

KEYWORDS: X-rays, High speed imaging, X-ray imaging, Metals, Materials processing, Laser cutting, Visualization, Laser processing, Imaging systems, Analytical research

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Proceedings Article | 21 September 2021 Presentation + Paper

Current status of development of electroforming process for high-precision soft x-ray mirrors

T. Kume, G. Yamaguchi, K. Hiraguri, Y. Matsuzawa, Y. Imamura, H. Miyashita, T. Saito, Y. Takeo, Y. Senba, H. Kishimoto, H. Ohashi, H. Hashizume, H. Mimura

Proceedings Volume 11837, 1183707 (2021) https://doi.org/10.1117/12.2594044

KEYWORDS: X-rays, Mirrors, X-ray optics, Synchrotrons, Reflectivity, Light sources

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Proceedings Article | 21 September 2021 Presentation + Paper

Development of figure correction system for axisymmetric x-ray mirrors

Shunya Yokomae, Yoko Takeo, Takenori Shimamura, Yusuke Matsuzawa, Takehiro Kume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Proceedings Volume 11837, 1183709 (2021) https://doi.org/10.1117/12.2594523

KEYWORDS: Mirrors, X-rays, Surface finishing, Abrasives, Nickel, Wavefronts, X-ray diffraction, Synchrotron radiation, Surface micromachining, Phase retrieval, X-ray optics

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Proceedings Article | 21 September 2021 Presentation + Paper

Electrodeposition simulation for fabricating Wolter mirrors of x-ray telescopes

Akinari Ito, Gota Yamaguchi, Takafumi Watanabe, Yoko Takeo, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Kentaro Hiraguri, Keisuke Tamura, Ayumu Takigawa, Tetsuo Kanoh, Naoki Ishida, Ikuyuki Mitsuishi, Hirokazu Hashizume, Hidekazu Mimura

Proceedings Volume 11837, 118370D (2021) https://doi.org/10.1117/12.2595124

KEYWORDS: Mirrors, X-ray telescopes, Electrodes, Nickel, X-rays, X-ray optics, Plating, X-ray astronomy, X-ray imaging, Stars

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Proceedings Article | 13 December 2020 Paper

Advanced fabrication technologies for ultraprecise replicated mirrors for x-ray telescopes

Hidekazu Mimura, Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Akinari Ito, Yusuke Matsuzawa, Takahiro Saito, Kentarou Hiraguri, Yusuke Takehara, Ayumu Takigawa, Keisuke Tamura, Tetsuo Kanoh, Kenji Tachibana, Hirokazu Hashizume, Ikuyuki Mitsuishi

Proceedings Volume 11444, 114441G (2020) https://doi.org/10.1117/12.2560892

KEYWORDS: Mirrors, X-ray telescopes, Nickel, X-rays, Synchrotron radiation, Profilometers, Laser beam diagnostics, Spatial resolution, Magnetorheological finishing, Fabrication

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Proceedings Article | 13 December 2020 Poster

Space electroformed x-ray optics development

Ayumu Takigawa, Yusuke Takehara, Tetsuo Kanoh, Ryusei Yamaguchi, Naoki Ishida, Keisuke Tamura, Gota Yamaguchi, Akinari Ito, Yoko Takeo, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Kentarou Hiraguri, Hirokazu Hashizume, Hidekazu Mimura, Ikuyuki Mitsuishi

Proceedings Volume 11444, 114447B (2020) https://doi.org/10.1117/12.2557352

KEYWORDS: X-ray optics, Astronomical imaging, Spatial resolution, Aluminum, Plating, Mirrors

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Proceedings Article | 8 September 2020 Presentation + Paper

Development of precise electroformed Wolter mirror for X-ray astronomy

Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Yusuke Matsuzawa, Kentaro Hiraguri, Yoichi Imamura, Hiroaki Miyashita, Keisuke Tamura, Yusuke Takehara, Ayumu Takigawa, Tetsuo Kanoh, Kenji Tachibana, Ikuyuki Mitsuishi, Hirokazu Hashizume, Hidekazu Mimura

Proceedings Volume 11491, 114910K (2020) https://doi.org/10.1117/12.2569834

KEYWORDS: Mirrors, X-ray astronomy, Synchrotrons, Fabrication, Space mirrors, Objectives, Spatial resolution, X-rays, Quartz, Glasses

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Proceedings Article | 4 September 2020 Presentation + Paper

High precision free-form optics and application to soft x-ray mirrors

T. Kume, K. Hiraguri, Y. Imamura, H. Miyashita, T. Mukoda, Y. Matsuzawa, Y. Takeo, Y. Senba, H. Kishimoto, H. Ohashi, H. Mimura, H. Hashizume

Proceedings Volume 11491, 114910G (2020) https://doi.org/10.1117/12.2568909

KEYWORDS: Mirrors, X-rays, Freeform optics, Optics manufacturing, Precision optics, X-ray optics, Light sources, Solids

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Proceedings Article | 21 August 2020 Presentation + Paper

Design of two-stage soft-X-ray nano-focusing system with a ring-focusing mirror and quasi-Wolter mirror

Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura, Hiroaki Miyashita, Kentarou Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Proceedings Volume 11492, 114920N (2020) https://doi.org/10.1117/12.2570007

KEYWORDS: Mirrors, X-rays, Tolerancing, Monochromatic aberrations, Error analysis, X-ray technology, X-ray optics, Wavefront analysis, Optical design, Wavefront metrology

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Proceedings Article | 21 August 2020 Presentation

Development of shape measurement system for high precision Wolter mandrel

Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Proceedings Volume 11492, 114920M (2020) https://doi.org/10.1117/12.2568929

KEYWORDS: Mirrors, X-ray optics, X-ray imaging, Spatial resolution, Precision measurement, Profilometers

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Proceedings Article | 21 August 2020 Presentation + Paper

Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing

Takenori Shimamura, Yoko Takeo, Takashi Kimura, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Proceedings Volume 11492, 114920P (2020) https://doi.org/10.1117/12.2569845

KEYWORDS: Mirrors, X-rays, Reflectivity, X-ray optics, X-ray diffraction, X-ray microscopy, Diffraction, X-ray imaging, Light sources

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Proceedings Article | 27 September 2019 Paper

Development of organic abrasive machining system for fabricating soft x-ray ellipsoidal mirrors

Y. Matsuzawa, S. Yokomae, J. Guo, K. Hiraguri, H. Hashizume, H. Mimura

Proceedings Volume 11108, 1110803 (2019) https://doi.org/10.1117/12.2529008

KEYWORDS: Mirrors, Abrasives, Surface finishing, X-rays, Polishing, Particles, X-ray optics, Nickel, X-ray technology

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Proceedings Article | 9 September 2019 Paper

Three-dimensional shape measurement of an ellipsoidal mirror by industrial x-ray computed tomography

Satsuki Shimizu, Yoko Takeo, Gota Yamaguchi, Yutaka Ohtake, Yukie Nagai, Hidekazu Mimura

Proceedings Volume 11109, 111090I (2019) https://doi.org/10.1117/12.2530321

KEYWORDS: Mirrors, X-ray computed tomography, X-rays, Reflectivity

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Proceedings Article | 9 September 2019 Paper

An optical design of twin Wolter mirrors for focusing and imaging experiments with soft X-ray free electron lasers

S. Egawa, G. Yamaguchi, H. Motoyama, S. Owada, Y. Kubota, K. Tono, H. Ohashi, M. Yabashi, H. Mimura

Proceedings Volume 11108, 1110804 (2019) https://doi.org/10.1117/12.2529039

KEYWORDS: Mirrors, Objectives, X-rays, Optical design, Free electron lasers, X-ray imaging, Imaging systems, X-ray lasers, Optical simulations, Spatial resolution

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Proceedings Article | 9 September 2019 Paper

Development of 120-mm-long ellipsoidal mirror for soft x-ray microscopy

T. Kume, H. Hashizume, K. Hiraguri, Y. Imamura, H. Miyashita, T. Mukoda, Y. Matsuzawa, G. Yamaguchi, Y. Takeo, T. Shimamura, Y. Senba, H. Kishimoto, H. Ohashi, H. Mimura

Proceedings Volume 11108, 1110806 (2019) https://doi.org/10.1117/12.2528296

KEYWORDS: Mirrors, X-rays, X-ray microscopy, X-ray optics

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Proceedings Article | 18 September 2018 Paper

Ptychography simulations for precisely measuring wavefront profiles in soft x-ray focusing system based on ellipsoidal mirror

Yoko Takeo, Hiroto Motoyama, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Proceedings Volume 10761, 107610F (2018) https://doi.org/10.1117/12.2320961

KEYWORDS: Mirrors, X-rays, Wavefronts, X-ray imaging, Optical simulations

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Proceedings Article | 7 September 2017 Paper

Three-dimensional shape measurement for x-ray ellipsoidal mirror

T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, H. Mimura

Proceedings Volume 10385, 103850O (2017) https://doi.org/10.1117/12.2273666

KEYWORDS: Mirrors, X-rays, Data analysis, Metrology

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Proceedings Article | 6 September 2017 Paper

Optical design of a sub-1-μm focusing system for soft x-ray free electron lasers

Hiroto Motoyama, Shigeki Owada, Kensuke Tono, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Hidekazu Mimura

Proceedings Volume 10386, 1038609 (2017) https://doi.org/10.1117/12.2271282

KEYWORDS: Mirrors, X-rays, Free electron lasers, Optical design, X-ray lasers, Light sources, Diffraction, Extreme ultraviolet, Light-matter interactions, Coating

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Proceedings Article | 25 October 2016 Paper

Evaluation of figure accuracy of Wolter mirror fabricated by electroforming

Satoru Egawa, Takehiro Kume, Yoko Takeo, Yoshinori Takei, Hiroto Motoyama, Hidekazu Mimura

Proceedings Volume 9687, 968705 (2016) https://doi.org/10.1117/12.2243422

KEYWORDS: Mirrors, X-ray microscopy, Magnetorheological finishing, Phase retrieval, Wavefronts, Microscopes, Nickel, Spatial frequencies, X-rays, Objectives

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Proceedings Article | 20 September 2016 Presentation + Paper

Wavefront measurement of vortex beam using ptychographic phase retrieval

Takahiro Saito, Yoko Takeo, Hidekazu Mimura

Proceedings Volume 9982, 998202 (2016) https://doi.org/10.1117/12.2235725

KEYWORDS: Wavefronts, Phase retrieval, Diffraction, Optical testing, Helium neon lasers, Spiral phase plates, CCD cameras, Spatial light modulators, Holograms, Charge-coupled devices

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Proceedings Article | 15 September 2016 Presentation + Paper

Development of surface profiler for master mandrel of x-ray ellipsoidal mirror

Yoshinori Takei, Hidekazu Mimura

Proceedings Volume 9962, 99620C (2016) https://doi.org/10.1117/12.2235314

KEYWORDS: Mirrors, Profilometers, X-rays, Motion measurement, X-ray optics, EUV optics, Sensors, Spatial resolution, Nickel, Quartz

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Proceedings Article | 12 October 2015 Paper

Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors

Yoko Takeo, Takahiro Saito, Hidekazu Mimura

Proceedings Volume 9633, 96332C (2015) https://doi.org/10.1117/12.2195864

KEYWORDS: Mirrors, Wavefronts, Phase retrieval, Charge-coupled devices, Transmittance, CCD cameras, X-rays, Monochromatic aberrations, Laser development, X-ray characterization

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Proceedings Article | 26 August 2015 Paper

Evaluation of surface figure error profile of ellipsoidal mirror for soft x-ray focusing

Yoko Takeo, Takahiro Saito, Hidekazu Mimura

Proceedings Volume 9588, 95880A (2015) https://doi.org/10.1117/12.2188824

KEYWORDS: Mirrors, X-rays, Phase retrieval, Wavefronts, CCD cameras, X-ray optics, Metrology, Charge-coupled devices, Visible radiation, Wavefront sensors

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Proceedings Article | 26 August 2015 Paper

Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light

Hidekazu Mimura, Yoshinori Takei, Takahiro Saito, Takehiro Kume, Hiroto Motoyama, Satoru Egawa, Yoko Takeo, Takahiro Higashi

Proceedings Volume 9588, 95880L (2015) https://doi.org/10.1117/12.2187455

KEYWORDS: Mirrors, X-rays, Extreme ultraviolet, Geometrical optics, Wavefronts, X-ray optics, Chromatic aberrations, Spatial resolution, High harmonic generation, Free electron lasers

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Proceedings Article | 5 September 2014 Paper

Toward achromatic soft x-ray imaging system with sub-10-nm spatial resolution

Satoru Egawa, Hidekazu Mimura

Proceedings Volume 9207, 92070R (2014) https://doi.org/10.1117/12.2062702

KEYWORDS: Mirrors, Spatial resolution, Point spread functions, X-ray imaging, X-rays, Imaging systems, X-ray microscopy, Reflection, Optical alignment, Error analysis

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Proceedings Article | 27 September 2013 Paper

Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy

Yoshinori Takei, Takehiro Kume, Hiroto Motoyama, Kentaro Hiraguri, Hirokazu Hashizume, Hidekazu Mimura

Proceedings Volume 8848, 88480C (2013) https://doi.org/10.1117/12.2023940

KEYWORDS: Mirrors, X-rays, Surface finishing, Nickel, X-ray microscopy, Manufacturing, Glasses, Surface roughness, Magnetorheological finishing, Polishing

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Proceedings Article | 27 September 2013 Paper

Optical design of soft x-ray focusing system with ellipsoidal mirror for laboratory-based sources

Hiroto Motoyama, Takahiro Saito, Hidekazu Mimura

Proceedings Volume 8848, 88480E (2013) https://doi.org/10.1117/12.2023598

KEYWORDS: Mirrors, X-rays, Optical design, Light sources, Optical simulations, Diffraction, Spherical lenses, X-ray optics, High harmonic generation, X-ray diffraction

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Proceedings Article | 27 September 2013 Paper

Damage threshold investigation using grazing incidence irradiation by hard x-ray free electron laser

T. Koyama, H. Yumoto, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi

Proceedings Volume 8848, 88480T (2013) https://doi.org/10.1117/12.2025377

KEYWORDS: Reflectivity, X-rays, Mirrors, Laser damage threshold, Free electron lasers, Hard x-rays, Coating, Grazing incidence, Rhodium, X-ray optics

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Proceedings Article | 19 October 2012 Paper

Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval

Takahiro Saitou, Yoshinori Takei, Hidekazu Mimura

Proceedings Volume 8501, 850103 (2012) https://doi.org/10.1117/12.930340

KEYWORDS: Mirrors, X-rays, Phase retrieval, Charge-coupled devices, Wavefronts, Linear filtering, Spherical lenses, Metrology, X-ray optics, Reflection

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Proceedings Article | 28 September 2011 Paper

Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8139, 813905 (2011) https://doi.org/10.1117/12.892987

KEYWORDS: Mirrors, X-rays, X-ray microscopy, Microscopes, Spatial resolution, Point spread functions, X-ray imaging, Imaging systems, X-ray optics, Microscopy

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Proceedings Article | 24 September 2010 Paper

An adaptive optical system for sub-10nm hard x-ray focusing

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7803, 780304 (2010) https://doi.org/10.1117/12.862291

KEYWORDS: Mirrors, Hard x-rays, X-rays, Wavefronts, X-ray optics, Optical fiber cables, Optical alignment, Phase measurement, Adaptive optics, Control systems

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Proceedings Article | 27 August 2010 Paper

Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7802, 780202 (2010) https://doi.org/10.1117/12.860405

KEYWORDS: Mirrors, X-rays, Satellites, Spatial frequencies, Imaging systems, Microscopes, X-ray microscopy, Image resolution, Spatial resolution, Hard x-rays

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Proceedings Article | 30 April 2009 Paper

Requirements on hard x-ray grazing incidence optics for European XFEL: analysis and simulation of wavefront transformations

Liubov Samoylova, Harald Sinn, Frank Siewert, Hidekazu Mimura, Kazuto Yamauchi, Thomas Tschentscher

Proceedings Volume 7360, 73600E (2009) https://doi.org/10.1117/12.822251

KEYWORDS: Mirrors, Wavefronts, X-ray optics, Wave propagation, Optical components, Free electron lasers, Hard x-rays, Reflection, X-rays, Grazing incidence

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Proceedings Article | 3 September 2008 Paper

Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm

Hidekazu Mimura, Shinya Morita, Takashi Kimura, Daisuke Yamakawa, Weimin Lin, Yoshihiro Uehara, Hirokatsu Yumoto, Satoshi Matsuyama, Yoshinori Nishino, Kenji Tamasaku, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Hitoshi Ohmori, Kazuto Yamauchi

Proceedings Volume 7077, 70770R (2008) https://doi.org/10.1117/12.795643

KEYWORDS: Mirrors, X-rays, Photography, X-ray lasers, Free electron lasers, X-ray technology, Hard x-rays, Particles, Stitching interferometry, Synchrotron technology

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Proceedings Article | 3 September 2008 Paper

Development of adaptive mirror for wavefront correction of hard x-ray nanobeam

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 7077, 707709 (2008) https://doi.org/10.1117/12.796029

KEYWORDS: Mirrors, X-rays, Wavefronts, Ceramics, Hard x-rays, Silicon, Fizeau interferometers, X-ray optics, Optical simulations, Optical components

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Proceedings Article | 3 September 2008 Paper

Aberrations in curved x-ray multilayers

Ch. Morawe, J.-P. Guigay, V. Mocella, C. Ferrero, H. Mimura, S. Handa, K. Yamauchi

Proceedings Volume 7077, 70770T (2008) https://doi.org/10.1117/12.794534

KEYWORDS: Mirrors, Optical components, Interfaces, X-rays, X-ray optics, Diffraction, Monochromators, Ray tracing, Reflection, Refraction

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Proceedings Article | 1 October 2007 Paper

Hard x-ray wavefront measurement and control for hard x-ray nanofocusing

Soichiro Handa, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6704, 670404 (2007) https://doi.org/10.1117/12.733749

KEYWORDS: Mirrors, Wavefronts, Hard x-rays, X-rays, Platinum, Metrology, Sputter deposition, Multilayers, Interferometry, Spherical lenses

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Proceedings Article | 1 October 2007 Paper

Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long x-ray mirror

Haruhiko Ohashi, Takashi Tsumura, Hiromi Okada, Hidekazu Mimura, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Kazuto Yamauchi, Tetsuya Ishikawa

Proceedings Volume 6704, 670405 (2007) https://doi.org/10.1117/12.733476

KEYWORDS: Mirrors, Multispectral imaging, Interferometers, X-rays, Fizeau interferometers, Actuators, Synchrotron radiation, Head, Photography, Neodymium

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Proceedings Article | 27 September 2007 Paper

Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors

A. Rommeveaux, L. Assoufid, H. Ohashi, H. Mimura, K. Yamauchi, J. Qian, T. Ishikawa, C. Morawe, A. Macrander, A. Khounsary, S. Goto

Proceedings Volume 6704, 67040B (2007) https://doi.org/10.1117/12.736171

KEYWORDS: Mirrors, Spherical lenses, Metrology, X-rays, Error analysis, Silicon, Silicon carbide, Interferometry, Optical components, Sensors

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Proceedings Article | 20 September 2007 Paper

Reflective optics for sub-10nm hard x-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 6705, 67050L (2007) https://doi.org/10.1117/12.734752

KEYWORDS: Mirrors, X-rays, Multilayers, Hard x-rays, X-ray optics, Reflectivity, Reflection, Diffraction, X-ray diffraction, Optical design

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Proceedings Article | 29 August 2006 Paper

Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 6317, 631718 (2006) https://doi.org/10.1117/12.681944

KEYWORDS: Mirrors, X-ray optics, X-rays, Hard x-rays, Reflectivity, Satellites, X-ray sources, Geometrical optics, Optical simulations, Beam shaping

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Proceedings Article | 29 August 2006 Paper

High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631719 (2006) https://doi.org/10.1117/12.681964

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Microscopes, Spatial resolution, Visualization, Gallium, Gold, Hard x-rays, Light sources

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Proceedings Article | 29 August 2006 Paper

At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631709 (2006) https://doi.org/10.1117/12.681587

KEYWORDS: Mirrors, Metrology, X-rays, Hard x-rays, Optical design, Phase retrieval, Diffraction, Reflection, Multilayers, Photovoltaics

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Proceedings Article | 17 September 2005 Paper

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 5921, 59210M (2005) https://doi.org/10.1117/12.623103

KEYWORDS: Mirrors, Spatial resolution, X-rays, Particles, Multispectral imaging, Head, Hard x-rays, Interferometry, Computing systems, X-ray imaging

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Proceedings Article | 17 September 2005 Paper

Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

Lahsen Assoufid, Amparo Rommeveaux, Haruhiko Ohashi, Kazuto Yamauchi, Hidekazu Mimura, Jun Qian, Olivier Hignette, Tetsuya Ishikawa, Christian Morawe, Albert Macrander, Ali Khounsary, Shunji Goto

Proceedings Volume 5921, 59210J (2005) https://doi.org/10.1117/12.623209

KEYWORDS: Mirrors, Silicon, Metrology, Data conversion, Error analysis, Sensors, X-rays, Fourier transforms, Optical metrology, Synchrotron radiation

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Proceedings Article | 31 August 2005 Paper

Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5918, 591804 (2005) https://doi.org/10.1117/12.623035

KEYWORDS: Mirrors, X-rays, Tolerancing, Diffraction, Hard x-rays, X-ray optics, Microscopes, Spatial resolution, Autocollimators, X-ray microscopy

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Proceedings Article | 18 October 2004 Paper

Microstitching interferometry for nanofocusing mirror optics

Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567511

KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, X-rays, Hard x-rays, Fringe analysis, Superposition, Stitching interferometry, Spatial resolution

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Proceedings Article | 18 October 2004 Paper

Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Satoshi Matsuyama, Hirokatsu Yumoto, Kazumasa Ueno, Masafumi Shibahara, Katsuyoshi Endo, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567501

KEYWORDS: Mirrors, Hard x-rays, X-rays, Electrodes, Head, Plasma, X-ray optics, Manufacturing, Metrology, Platinum

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Proceedings Article | 18 October 2004 Paper

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567515

KEYWORDS: Mirrors, X-rays, Hard x-rays, X-ray optics, Optical alignment, X-ray microscopy, Optical simulations, Geometrical optics, Actuators, Mirror pointing

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Proceedings Article | 13 January 2004 Paper

Development of a figure correction method having spatial resolution close to 0.1 mm

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.520825

KEYWORDS: Mirrors, X-rays, X-ray imaging, Spatial resolution, X-ray technology, Optical simulations, Multispectral imaging, Particles, Interferometers, Surface finishing

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Proceedings Article | 13 January 2004 Paper

Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, Yukihito Ishizaka

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.515127

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Plasma, Electrodes, X-ray optics, Beam shaping, X-ray technology, Chemical reactions, Hard x-rays

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Proceedings Article | 24 December 2002 Paper

Wave-optical analysis of submicron focusing of hard x-ray beams by reflective optics

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Masahiko Kanaoka, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453752

KEYWORDS: Mirrors, X-rays, X-ray optics, Satellites, X-ray microscopy, Hard x-rays, Microscopy, Reflectivity, Wavefronts, Chromatic aberrations

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Proceedings Article | 24 December 2002 Paper

Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM)

Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi, Yasuhisa Sano, Akira Saito, Takehiko Kinoshita, Katsuyoshi Endo, Yuzo Mori, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453749

KEYWORDS: Electrodes, Mirrors, Plasma, X-rays, Atmospheric plasma, Reflection, Aspheric lenses, Manufacturing, Crystals, Silicon

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Proceedings Article | 24 December 2002 Paper

Submicron focusing of hard x-ray beam by elliptically figured mirrors for scanning x-ray microscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Kazumasa Ueno, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453754

KEYWORDS: Mirrors, X-rays, Manufacturing, Hard x-rays, Plasma, Crystals, Gold, X-ray microscopy, Optics manufacturing, Stitching interferometry

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Proceedings Article | 14 November 2001 Paper

Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics

Yuzo Mori, Y. Yamauchi, Kazuya Yamamura, Hidekazu Mimura, A. Saito, H. Kishimoto, Y. Sekito, Masahiko Kanaoka, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4501, (2001) https://doi.org/10.1117/12.448496

KEYWORDS: Mirrors, Plasma, X-rays, Electrodes, Head, Surface finishing, Control systems, Sensors, Optical fabrication, Chemical species

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Showing 5 of 69 publications

Proceedings Volume Editor (6)

SPIE Conference Volume | 22 October 2024

Advances in X-Ray/EUV Optics and Components XIX

SPIE Conference Volume | 24 October 2023

Advances in X-Ray/EUV Optics and Components XVIII

SPIE Conference Volume | 13 October 2022

Advances in X-Ray/EUV Optics and Components XVII

SPIE Conference Volume | 8 October 2021

Advances in X-Ray/EUV Optics and Components XVI

SPIE Conference Volume | 23 September 2020

Advances in X-Ray/EUV Optics and Components XV

Showing 5 of 6 publications

Conference Committee Involvement (20)

Advances in Metrology for X-Ray and EUV Optics XI

3 August 2025 | San Diego, California, United States

Advances in X-Ray/EUV Sources, Optics, and Components XX

3 August 2025 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XIX

19 August 2024 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics X

23 August 2023 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVIII

22 August 2023 | San Diego, California, United States

Advances in Computational Methods for X-Ray Optics VI

20 August 2023 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVII

22 August 2022 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XVI

2 August 2021 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XV

26 August 2020 | Online Only, California, United States

Advances in Metrology for X-Ray and EUV Optics IX

24 August 2020 | Online Only, California, United States

Advances in X-Ray/EUV Optics and Components XIV

14 August 2019 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VIII

11 August 2019 | San Diego, California, United States

Adaptive X-Ray Optics V

21 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XIII

20 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XII

8 August 2017 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VII

6 August 2017 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VI

29 August 2016 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics V

18 August 2014 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics IV

12 August 2012 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics III

1 August 2010 | San Diego, California, United States

Showing 5 of 20 Conference Committees

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