Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama; T. Wakioka; H. Mimura; T. Kimura; N. Kidani; Y. Sano; Y. Nishino; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.860405

27 August 2010 Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Author Affiliations +

Proceedings Volume 7802, Advances in X-Ray/EUV Optics and Components V; 780202 (2010) https://doi.org/10.1117/12.860405
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

To realize achromatic full-field hard X-ray microscopy with a resolution better than 100 nm, we studied an imaging system consisting of an elliptical mirror and a hyperbolic mirror. The figure accuracies of the elliptical and hyperbolic mirrors required to obtain diffraction-limited resolution were investigated using a wave-optical simulator, and then elliptical and hyperbolic mirrors were precisely fabricated, following the criterion of the figure accuracies. Experiments to form a demagnified image of a one-dimensional slit installed 45 m upstream were conducted using the imaging system at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. The system could form a demagnified image with the best resolution of 78 nm. In addition, the field of view to obtain a resolution better than 200 nm was 4.2 micron.

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S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 780202 (27 August 2010); https://doi.org/10.1117/12.860405

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