Dr. Makina Yabashi Profile

Dr. Makina Yabashi

Group Director at RIKEN SPring-8 Ctr

SPIE Involvement:

Author | Editor

Publications (74)

Proceedings Article | 4 October 2023 Presentation

Two-stage soft x-ray focusing system developed at BL1 of SACLA

Hiroto Motoyama, Satoru Egawa, Gota Yamaguchi, Shigeki Owada, Takashi Kimura, Makina Yabashi, Hidekazu Mimura

Proceedings Volume PC12694, PC1269408 (2023) https://doi.org/10.1117/12.2682630

KEYWORDS: X-rays, Mirrors, Signal detection, Optical properties, Signal intensity, Nonlinear optics, X-ray lasers, Signal generators, Free electron lasers

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Proceedings Article | 9 June 2023 Presentation + Paper

Fabrication of atomically precise, super smooth, and damage-free x-ray optics

Pho Bui, Masahiko Kanaoka, Makina Yabashi, Tetsuya Ishikawa, Yasuhisa Sano, Kazuto Yamauchi

Proceedings Volume 12581, 1258109 (2023) https://doi.org/10.1117/12.2668438

KEYWORDS: Surface roughness, Optical surfaces, Surface finishing, Mirror surfaces, X-ray optics, Fabrication, Etching, Polishing, Optics manufacturing, X-rays

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An atomically precise, super smooth, and damage-free surface is highly demanded for x-ray mirrors, multilayer optics, channel-cut crystal monochromators (CCM), and gratings. An ultra-precision optic with a figure error of several nm is crucial for single-nanometer spatial resolution, signal strength, and contrast. Moreover, sub-angstrom root-mean-square surface roughness is beneficial for high reflectivity and the lowest unwanted scattering. Additionally, a damage-free surface with no alter layer is greatly desired for CCM and grating substrates because it is essential for the high reflectivity of the CCM and the uniform etching rate of the grating’s ruling. In the manufacturing of x-ray mirrors, to obtain the desired figure error, a non-contact figuring method, such as ion beam figuring (IBF), plasma chemical vaporization machining (PCVM), or Elastic Emission Machining (EEM), is usually employed thanks to its high controllability and stability. EEM has proved the best performance in terms of achieving a low figure error and maintaining a good surface roughness. After shaping/figuring, a finishing method is usually applied to improve its surface roughness without distorting its figure error. Recently, Catalyst-Referred Etching (CARE) has realized its potential and applicability to x-ray mirror manufacturing as a finishing method. Thanks to its removal mechanism, a highly ordered surface with a root-mean-square of 0.03 nm RMS is attained. In the polishing of a CCM, because a mechanical method is usually used to polish its surface at the narrow gap, the residual mechanical damage induced a low reflectivity and low spatial resolution. PCVM with a wire electrode has recently been proposed and demonstrated its excellent performance. The damage-free surface of a CCM with a gap of less than 100µm has been successfully realized by PCVM. In this paper, recent achievements in figuring (EEM), surface finishing (CARE), and damage removal (PCVM) are presented and discussed.

Proceedings Article | 6 June 2023 Presentation

Nonisotropic atomic motion in a nonthermal phase transition of diamond (Conference Presentation)

Philip Heimann, Nicholas Hartley, Ichiro Inoue, Andre Antoine, Fabien Dorchies, Roger Falcone, Jérôme Gaudin, Hauke Höppner, Yuichi Inubushi, Hae Ja Lee, Vladimir Lipp, Paloma Martinez, Nikita Medvedev, Franz Tavella, Victor Tkachenko, Sven Toleikis, Makina Yabashi, Toshinori Yabuuchi, Jumpei Yamada, Beata Ziaja-Motyka

Proceedings Volume 12578, 1257808 (2023) https://doi.org/10.1117/12.2669316

KEYWORDS: Diamond, X-rays, Diffraction, X-ray diffraction, Graphite, X-ray lasers, Laser radiation, Free electron lasers, Crystals

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Proceedings Article | 3 October 2022 Presentation

High-speed imaging of metal drilling using 100-keV X-rays at SPring-8 (Conference Presentation)

Hidekazu Mimura, Gota Yamaguchi, Keito Tamura, Hirokatsu Yumoto, Takahisa Koyam, Hidekazu Takano, Yujiro Hayashi, Makina Yabashi, Haruhiko Ohashi

Proceedings Volume PC12240, PC1224009 (2022) https://doi.org/10.1117/12.2635300

KEYWORDS: X-rays, High speed imaging, X-ray imaging, Metals, Materials processing, Laser cutting, Visualization, Laser processing, Imaging systems, Analytical research

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Proceedings Article | 1 August 2021 Presentation

Image-based wavefront measurement for full-field x-ray microscopy

Yuto Tanaka, Satoshi Matsuyama, Takato Inoue, Nami Nakamura, Jumpei Yamada, Yoshiki Kohmura, Makina Yabashi, Kazuhiko Omote, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11839, 118390A (2021) https://doi.org/10.1117/12.2595026

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Proceedings Article | 1 August 2021 Presentation

Optimization of mirror deformation strategy using mechanical and piezoelectric bending system

Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume 11837, 118370B (2021) https://doi.org/10.1117/12.2594944

KEYWORDS: Mirrors, Deformable mirrors, X-rays, Zoom lenses, X-ray optics, Synchrotron radiation, Statistical analysis, Control systems, Beam controllers

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Proceedings Article | 15 September 2020 Presentation + Paper

A test bench of X-ray optics for next-generation high-energy high-flux X-ray beamlines

Hirokatsu Yumoto, Haruhiko Ohashi, Hiroshi Yamazaki, Yasunori Senba, Takahisa Koyama, Kenji Tamasaku, Ichiro Inoue, Taito Osaka, Jumpei Yamada, Makina Yabashi, Shunji Goto

Proceedings Volume 11492, 114920I (2020) https://doi.org/10.1117/12.2570154

KEYWORDS: Hard x-rays, Monochromators, Mirrors, Silicon, Optical components, Reflection, Crystals, Liquid crystals, X-ray optics, X-rays

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Proceedings Article | 22 August 2020 Presentation

Development of x-ray mirrors for XFEL sub-10 nm focusing system based on Wolter type III geometry

Takato Inoue, Jumpei Yamada, Satoshi Matsuyama, Nami Nakamura, Taito Osaka, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11491, 114910B (2020) https://doi.org/10.1117/12.2566856

KEYWORDS: Mirrors, X-rays, X-ray lasers, Free electron lasers, Spatial coherence, Nonlinear optics, X-ray optics, Complex systems, Tolerancing, Interferometers

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Proceedings Article | 21 August 2020 Presentation

Adaptive x-ray zoom condenser system based on concave and convex mirrors

Yuka Nishioka, Hiroyuki Yamaguchi, Satoshi Matsuyama, Juniki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi

Proceedings Volume 11491, 114910P (2020) https://doi.org/10.1117/12.2568417

KEYWORDS: Mirrors, X-rays, Zoom lenses, X-ray optics, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 9 September 2019 Presentation

Development of x-ray adaptive focusing optical system based on the combination of concave mirror and convex mirror (Conference Presentation)

Hiroyuki Yamaguchi, Satoshi Matsuyama, Junki Sonoyama, Kazuki Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11108, 1110805 (2019) https://doi.org/10.1117/12.2528618

KEYWORDS: X-rays, X-ray optics, Deformable mirrors, Mirrors, Beam controllers, Beam shaping, Synchrotron radiation, X-ray lasers, Free electron lasers, Control systems

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Proceedings Article | 9 September 2019 Paper

An optical design of twin Wolter mirrors for focusing and imaging experiments with soft X-ray free electron lasers

S. Egawa, G. Yamaguchi, H. Motoyama, S. Owada, Y. Kubota, K. Tono, H. Ohashi, M. Yabashi, H. Mimura

Proceedings Volume 11108, 1110804 (2019) https://doi.org/10.1117/12.2529039

KEYWORDS: Mirrors, Objectives, X-rays, Optical design, Free electron lasers, X-ray imaging, Imaging systems, X-ray lasers, Optical simulations, Spatial resolution

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Proceedings Article | 9 September 2019 Presentation

Development of high-resolution full-field x-ray microscope based on multilayer advanced Kirkpatrick-Baez mirrors (Conference Presentation)

Satoshi Matsuyama, Jumpei Yamada, Taku Hagiwara, Kazuhiko Omote, Raita Hirose, Yoshihiro Takeda, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11112, 1111207 (2019) https://doi.org/10.1117/12.2528366

KEYWORDS: Mirrors, X-rays, Microscopes, Spatial resolution, X-ray optics, Objectives, Cameras, Stars

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Proceedings Article | 9 September 2019 Presentation

Beam size measurement for XFEL nanobeam using intensity interferometer of x-ray fluorescence (Conference Presentation)

Nami Nakamura, Satoshi Matsuyama, Takato Inoue, Ichiro Inoue, Taito Osaka, Yuichi Inubushi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11109, 111090L (2019) https://doi.org/10.1117/12.2532283

KEYWORDS: X-ray fluorescence spectroscopy, Interferometers, Optical testing, Thin films, Nonlinear optics, X-ray optics, Optical fabrication, Optical alignment, Wavefront sensors, Spatial coherence

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Proceedings Article | 9 September 2019 Presentation

Precision focusing mirror alignment at SACLA using new nanobeam diagnosis (Conference Presentation)

Takato Inoue, Satoshi Matsuyama, Nami Nakamura, Hirokatsu Yumoto, Yuichi Inubushi, Takahisa Koyama, Taito Osaka, Ichiro Inoue, Kensuke Tono, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 11108, 1110802 (2019) https://doi.org/10.1117/12.2526972

KEYWORDS: Mirrors, X-rays, Beam shaping, Free electron lasers, Speckle pattern, X-ray lasers, Nanoprobes, Laser development, Diffraction gratings, Interferometers

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Proceedings Article | 14 May 2019 Presentation

Status and perspective on the SACLA facility (Conference Presentation)

Makina Yabashi

Proceedings Volume 11035, 1103502 (2019) https://doi.org/10.1117/12.2523624

KEYWORDS: X-rays, Free electron lasers, Electron beams, X-ray optics, Sensors, Reflectivity, Mirrors, Absorption, Ultrafast phenomena, Synchrotrons

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Proceedings Article | 24 April 2019 Paper

Pulse power measurements and attenuator characterization of the hard X-ray beamline at the Linac Coherent Light Source

Sanghoon Song, Roberto Alonso-Mori, Matthieu Chollet, Yiping Feng, James Glownia, Henrik Lemke, Marcin Sikorski, Diling Zhu, Stefan Moeller, Hae Ja Lee, Mark Hunter, Gabriella Carini, Kai Tiedtke, Ulf Jastrow, Andrey Sorokin, Mathias Richter, Shigeki Owada, Kensuke Tono, Norio Saito, Takahiro Tanaka, Masahiro Kato, Makina Yabashi, Aymeric Robert

Proceedings Volume 11038, 1103810 (2019) https://doi.org/10.1117/12.2520827

KEYWORDS: X-rays, Power meters, Hard x-rays, X-ray detectors, Diagnostics, Free electron lasers

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Proceedings Article | 24 April 2019 Paper

Photoluminescence properties and characterization of LiF-based imaging detector irradiated by 10 keV XFEL beam

F. Bonfigli, N. Hartley, Y. Inubushi, M. Koenig, T. Matsuoka, S. Makarov, R. Montereali, E. Nichelatti, N. Ozaki, M. Piccinini, S. Pikuz, T. Pikuz, D. Sagae, M. Vincenti, M. Yabashi, T. Yabuuchi

Proceedings Volume 11035, 110350N (2019) https://doi.org/10.1117/12.2520907

KEYWORDS: Laser induced fluorescence, Luminescence, Crystals, Sensors, Laser crystals, X-rays, Image sensors, X-ray imaging, Cameras, Fluorine

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Proceedings Article | 25 January 2018 Presentation

Temporal diagnostics from photons: the experience with the PALM (Conference Presentation)

Pavle Juranic, Ishkhan Gorgisyan, Christian Erny, Rasmus Ischebeck, Luc Patthey, Claude Pradervand, Christopher Milne, H. Lemke, Andreas Dax, Milan Radovic, Christoph Hauri, Shigeki Owada, Tadashi Togashi, Tsukasa Katayama, Makina Yabashi

Proceedings Volume 10237, 1023705 (2018) https://doi.org/10.1117/12.2269770

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Proceedings Article | 18 October 2017 Presentation

Current status and future plan of the soft x-ray beamline at SACLA (Conference Presentation)

Shigeki Owada, Kyo Nakajima, Kensuke Tono, Yasumasa Joti, Tadashi Togashi, Kazuaki Togawa, Takahiro Inagaki, Toru Hara, Takashi Tanaka, Mitsuhiro Yamaga, Yasunori Senba, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Hitoshi Tanaka, Makina Yabashi

Proceedings Volume 10386, 103860G (2017) https://doi.org/10.1117/12.2275099

KEYWORDS: X-rays, Free electron lasers, Diagnostics, Laser optics, X-ray lasers, Hard x-rays, Prototyping, Laser development, X-ray sources, Synchrotrons

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Proceedings Article | 6 September 2017 Paper

Optical design of a sub-1-μm focusing system for soft x-ray free electron lasers

Hiroto Motoyama, Shigeki Owada, Kensuke Tono, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi, Hidekazu Mimura

Proceedings Volume 10386, 1038609 (2017) https://doi.org/10.1117/12.2271282

KEYWORDS: Mirrors, X-rays, Free electron lasers, Optical design, X-ray lasers, Light sources, Diffraction, Extreme ultraviolet, Light-matter interactions, Coating

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Proceedings Article | 6 September 2017 Paper

Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope

Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 10386, 103860C (2017) https://doi.org/10.1117/12.2272904

KEYWORDS: Mirrors, X-rays, X-ray optics, Imaging systems, X-ray imaging, Microscopes, Wavefronts, X-ray microscopy, Chromatic aberrations, Sensors

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Proceedings Article | 21 June 2017 Presentation

Non-thermal damage to lead tungstate induced by intense short-wavelength laser radiation (Conference Presentation)

Vojtech Vozda, Pavel Boháček, Tomáš Burian, Jaromir Chalupský, Vera Hájková, Libor Juha, Ludek Vyšín, Jérôme Gaudin, Philip Heimann, Stefan Hau-Riege, Marek Jurek, Dorota Klinger, Jacek Krzywinski, Marc Messerschmidt, Stefan Moeller, Robert Nagler, Jerzy Pelka, Michael Rowen, William Schlotter, Michele Swiggers, Harald Sinn, Ryszard Sobierajski, Kai Tiedtke, Sven Toleikis, Thomas Tschentscher, Joshua Turner, Hubertus Wabnitz, Art Nelson, Maria Kozlova, Sam Vinko, Thomas Whitcher, Thomas Dzelzainis, Oldrich Renner, Karel Saksl, Roland Fäustlin, Ali Khorsand, Marta Fajardo, Bianca Iwan, Jakob Andreasson, Janos Hajdu, Nicusor Timneanu, Justin Wark, David Riley, Richard Lee, Mitsuru Nagasono, Makina Yabashi

Proceedings Volume 10236, 102360G (2017) https://doi.org/10.1117/12.2270944

KEYWORDS: Physics, Stanford Linear Collider, Free electron lasers, Lead, Photons, States of matter, Materials processing, Electrons, Analytical research, Raman spectroscopy

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Proceedings Article | 11 May 2017 Paper

Overview of optics, photon diagnostics and experimental instruments at SACLA: development, operation and scientific applications

Kensuke Tono, Tadashi Togashi, Yuichi Inubushi, Tetsuo Katayama, Shigeki Owada, Toshinori Yabuuchi, Akira Kon, Ichiro Inoue, Taito Osaka, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Makina Yabashi

Proceedings Volume 10237, 1023706 (2017) https://doi.org/10.1117/12.2268238

KEYWORDS: Mirrors, Laser optics, Silicon, X-ray lasers, Crystallography, Diagnostics, Free electron lasers, X-rays, X-ray optics, Hard x-rays

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Proceedings Article | 2 November 2016 Presentation

Current status of the EUV/soft x-ray FEL beamline at SACLA (Conference Presentation)

Shigeki Owada, Kyo Nakajima, Tadashi Togashi, Kensuke Tono, Yasumasa Joti, Takahiro Inagaki, Toru Hara, Takashi Tanaka, Kazuaki Togawa, Mitsuhiro Yamaga, Takashi Sugimoto, Yasunori Senba, Hirokatsu Yumoto, Takahisa Koyama, Haruhiko Ohashi, Hitoshi Tanaka, Makina Yabashi

Proceedings Volume 9963, 996303 (2016) https://doi.org/10.1117/12.2237475

KEYWORDS: Free electron lasers, X-rays, Hard x-rays, Prototyping, Extreme ultraviolet, Electron beams, Synchrotron radiation, X-ray optics, Alternate lighting of surfaces, Current controlled current source

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Proceedings Article | 27 October 2016 Presentation + Paper

Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9965, 996502 (2016) https://doi.org/10.1117/12.2238794

KEYWORDS: Mirrors, X-rays, Deformable mirrors, Beam shaping, X-ray optics, Collimation, Optical testing, Actuators, Electrodes, X-ray technology

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Proceedings Article | 12 May 2015 Paper

Damage to inorganic materials illuminated by focused beam of x-ray free-electron laser radiation

Takahisa Koyama, Hirokatsu Yumoto, Kensuke Tono, Tadashi Togashi, Yuichi Inubushi, Tetsuo Katayama, Jangwoo Kim, Satoshi Matsuyama, Makina Yabashi, Kazuto Yamauchi, Haruhiko Ohashi

Proceedings Volume 9511, 951107 (2015) https://doi.org/10.1117/12.2182778

KEYWORDS: Silicon, X-rays, Silica, Mirrors, Grazing incidence, Coating, Reflectivity, Free electron lasers, X-ray lasers, Metals

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Proceedings Article | 12 May 2015 Paper

The new design of the THz streak camera at PSI

I. Gorgisyan, P. Juranic, R. Ischebeck, A. Stepanov, V. Schlott, C. Pradervand, L. Patthey, M. Radovic, R. Abela, C. Hauri, B. Monoszlai, R. Ivanov, P. Peier, J. Liu, T. Togashi, S. Owada, K. Ogawa, T. Katayama, M. Yabashi, L. Rivkin

Proceedings Volume 9512, 95120D (2015) https://doi.org/10.1117/12.2182204

KEYWORDS: Terahertz radiation, Free electron lasers, Streak cameras, X-rays, Prototyping, Hard x-rays, Femtosecond phenomena, Pulsed laser operation, Diagnostics, Ionization

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Proceedings Article | 8 October 2014 Paper

Development of split-delay x-ray optics using Si(220) crystals at SACLA

Taito Osaka, Takashi Hirano, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 9210, 921009 (2014) https://doi.org/10.1117/12.2060238

KEYWORDS: Crystals, X-rays, Laser crystals, Mirrors, Beam splitters, X-ray optics, Free electron lasers, Alignment procedures, Diffraction, Crystal optics

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Proceedings Article | 3 October 2014 Paper

Development of a one-dimensional two-stage focusing system with two deformable mirrors

T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9208, 920802 (2014) https://doi.org/10.1117/12.2061821

KEYWORDS: Mirrors, X-rays, Deformable mirrors, Electrodes, Diffraction, Wavefronts, Actuators, Photography, 3D modeling, X-ray diffraction

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Proceedings Article | 5 September 2014 Paper

Characterization of thin HPHT IIa diamond by transmission and reflection measurements

Shunji Goto, Hiroshi Yamazaki, Ayumi Miura, Kenji Doi, Yuichi Inubushi, Haruhiko Ohashi, Makina Yabashi

Proceedings Volume 9207, 92070O (2014) https://doi.org/10.1117/12.2063594

KEYWORDS: Crystals, Transmittance, Diamond, X-rays, Diffraction, Reflection, Silicon, X-ray imaging, Reflectivity, Collimators

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Proceedings Article | 5 September 2014 Paper

Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy

S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 9207, 92070Q (2014) https://doi.org/10.1117/12.2060783

KEYWORDS: Mirrors, X-rays, Microscopes, Tungsten, X-ray microscopy, Absorption, Particles, Hard x-rays, Objectives, Spectroscopy

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Proceedings Article | 27 September 2013 Paper

Damage threshold investigation using grazing incidence irradiation by hard x-ray free electron laser

T. Koyama, H. Yumoto, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi

Proceedings Volume 8848, 88480T (2013) https://doi.org/10.1117/12.2025377

KEYWORDS: Reflectivity, X-rays, Mirrors, Laser damage threshold, Free electron lasers, Hard x-rays, Coating, Grazing incidence, Rhodium, X-ray optics

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Proceedings Article | 27 September 2013 Paper

Thin crystal development and applications for hard x-ray free-electron lasers

Taito Osaka, Makina Yabashi, Yasuhisa Sano, Kensuke Tono, Yuichi Inubushi, Takahiro Sato, Kanade Ogawa, Satoshi Matsuyama, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 8848, 884804 (2013) https://doi.org/10.1117/12.2023465

KEYWORDS: Crystals, Laser crystals, Silicon, Beam splitters, X-rays, Helium, Hard x-rays, Atmospheric plasma, Free electron lasers, Diffraction

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Proceedings Article | 27 September 2013 Paper

Damage characteristics of platinum/carbon multilayers under x-ray free-electron laser irradiation

Jangwoo Kim, Takahisa Koyama, Hirokatsu Yumoto, Ayaka Nagahira, Satoshi Matsuyama, Yasuhisa Sano, Makina Yabashi, Haruhiko Ohashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 8848, 88480S (2013) https://doi.org/10.1117/12.2022735

KEYWORDS: Multilayers, X-rays, Reflectivity, Platinum, Grazing incidence, Free electron lasers, Transmission electron microscopy, X-ray optics, Carbon, X-ray lasers

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Proceedings Article | 26 September 2013 Paper

Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8851, 885107 (2013) https://doi.org/10.1117/12.2023152

KEYWORDS: Mirrors, X-rays, Imaging systems, X-ray optics, X-ray imaging, Microscopes, Point spread functions, Cameras, X-ray microscopy, Spatial resolution

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Proceedings Article | 3 May 2013 Paper

Results from single shot grazing incidence hard x-ray damage measurements conducted at the SACLA FEL

Andrew Aquila, Cigdem Ozkan, Ryszard Sobierajski, Vera Hájková, Tomás Burian, Jakub Chalupsky, Libor Juha, Michael Störmer, Haruhiko Ohashi, Takahisa Koyama, Kensuke Tono, Yuichi Inubushi, Makina Yabashi, Harald Sinn, Thomas Tschentscher, Adrian Mancuso, Jérôme Gaudin

Proceedings Volume 8777, 87770H (2013) https://doi.org/10.1117/12.2017725

KEYWORDS: Free electron lasers, X-rays, Carbon, Mirrors, Grazing incidence, Hard x-rays, Optical coatings, X-ray optics, Laser damage threshold, Solids

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Proceedings Article | 17 October 2012 Paper

ultra-thin Bragg crystals for LCLS beam-sharing operation

Yiping Feng, Diling Zhu, Aymeric Robert, Henrik Lemke, Matthieu Chollet, David Fritz, Jerome Hastings, Jan Feldkamp, Marco Cammarata, Stefan Moeller, Makina Yabashi, Kensuke Tono, Xianrong Huang

Proceedings Volume 8504, 85040V (2012) https://doi.org/10.1117/12.930944

KEYWORDS: Liquid crystal lasers, X-rays, Crystals, Free electron lasers, Silicon, Laser crystals, Diffraction, X-ray diffraction, Hard x-rays, Surface finishing

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Proceedings Article | 15 October 2012 Paper

Diamond double-crystal monochromator at SPring-8

S. Goto, H. Yamazaki, Y. Shimizu, M. Suzuki, N. Kawamura, M. Mizumaki, M. Yabashi, K. Tamasaku, T. Ishikawa

Proceedings Volume 8502, 85020A (2012) https://doi.org/10.1117/12.932287

KEYWORDS: Crystals, Monochromators, Diamond, Laser crystals, Near field diffraction, Phase shifts, Image segmentation, Silicon, X-rays, Synchrotron radiation

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Proceedings Article | 15 October 2012 Paper

Development of piezoelectric adaptive mirror for hard x-ray nanofocusing

S. Matsuyama, T. Kimura, H. Nakamori, S. Imai, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8503, 850303 (2012) https://doi.org/10.1117/12.930276

KEYWORDS: Mirrors, Deformable mirrors, X-rays, Phase retrieval, Hard x-rays, Actuators, X-ray optics, Electrodes, Wavefronts, Beam shaping

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Proceedings Article | 6 October 2011 Paper

A single-shot intensity-position monitor for hard x-ray FEL sources

Yiping Feng, Jan Feldkamp, David Fritz, Marco Cammarata, Robert Aymeric, Chiara Caronna, Henrik Lemke, Diling Zhu, Sooheyong Lee, Sebastien Boutet, Garth Williams, Kensuke Tono, Makina Yabashi, Jerome Hastings

Proceedings Volume 8140, 81400Q (2011) https://doi.org/10.1117/12.893740

KEYWORDS: Free electron lasers, X-rays, Diodes, Liquid crystal lasers, Hard x-rays, X-ray detectors, Target detection, Electronics, Scattering, Precision measurement

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Proceedings Article | 28 September 2011 Paper

Characterization of beryllium foils for coherent x-ray applications of synchrotron radiation and XFEL beamlines

Shunji Goto, Sunao Takahashi, Yuichi Inubushi, Kensuke Tono, Takahiro Sato, Makina Yabashi

Proceedings Volume 8139, 813910 (2011) https://doi.org/10.1117/12.894506

KEYWORDS: X-rays, Beryllium, X-ray imaging, Synchrotron radiation, X-ray characterization, X-ray lasers, Free electron lasers, Polishing, Monochromators, Image processing

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Proceedings Article | 28 September 2011 Paper

Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8139, 813905 (2011) https://doi.org/10.1117/12.892987

KEYWORDS: Mirrors, X-rays, X-ray microscopy, Microscopes, Spatial resolution, Point spread functions, X-ray imaging, Imaging systems, X-ray optics, Microscopy

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Proceedings Article | 16 April 2011 Paper

Fundamental study on reaction mechanisms in chemically amplified extreme ultraviolet resists by using 61nm free-electron laser

Kazumasa Okamoto, Takahiro Kozawa, Takaki Hatsui, Yasuharu Tajima, Keita Oikawa, Mitsuru Nagasono, Takashi Kameshima, Tadashi Togashi, Kensuke Tono, Makina Yabashi, Hiroaki Kimura, Yasunori Senba, Haruhiko Ohashi, Takashi Sumiyoshi

Proceedings Volume 7972, 797217 (2011) https://doi.org/10.1117/12.879358

KEYWORDS: Ionization, Extreme ultraviolet, Free electron lasers, Ions, Electrons, Argon, Polymers, Protactinium, Absorption, Extreme ultraviolet lithography

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Proceedings Article | 28 February 2011 Paper

Ablation by short optical and x-ray laser pulses

N. Inogamov, S. Anisimov, V. Zhakhovsky, A. Ya. Faenov, Yu. V. Petrov, V. Khokhlov, V. Fortov, M. Agranat, S. Ashitkov, P. Komarov, I. Yu. Skobelev, Y. Kato, T. Pikuz, V. Shepelev, Y. Fukuda, M. Tanaka, M. Kishimoto, M. Ishino, M. Nishikino, M. Kando, T. Kawachi, M. Nagasono, H. Ohashi, M. Yabashi, K. Tono, Y. Senba, T. Togashi, T. Ishikawa

Proceedings Volume 7996, 79960T (2011) https://doi.org/10.1117/12.887429

KEYWORDS: Laser induced fluorescence, Crystals, Laser ablation, Aluminum, Laser crystals, Picosecond phenomena, Dielectrics, Tellurium, Ionization, Extreme ultraviolet

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Proceedings Article | 24 September 2010 Paper

An adaptive optical system for sub-10nm hard x-ray focusing

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7803, 780304 (2010) https://doi.org/10.1117/12.862291

KEYWORDS: Mirrors, Hard x-rays, X-rays, Wavefronts, X-ray optics, Optical fiber cables, Optical alignment, Phase measurement, Adaptive optics, Control systems

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Proceedings Article | 27 August 2010 Paper

Development of a one-dimensional Wolter mirror for an advanced Kirkpatrick-Baez mirror

S. Matsuyama, T. Wakioka, H. Mimura, T. Kimura, N. Kidani, Y. Sano, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 7802, 780202 (2010) https://doi.org/10.1117/12.860405

KEYWORDS: Mirrors, X-rays, Satellites, Spatial frequencies, Imaging systems, Microscopes, X-ray microscopy, Image resolution, Spatial resolution, Hard x-rays

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Proceedings Article | 3 September 2008 Paper

Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm

Hidekazu Mimura, Shinya Morita, Takashi Kimura, Daisuke Yamakawa, Weimin Lin, Yoshihiro Uehara, Hirokatsu Yumoto, Satoshi Matsuyama, Yoshinori Nishino, Kenji Tamasaku, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Hitoshi Ohmori, Kazuto Yamauchi

Proceedings Volume 7077, 70770R (2008) https://doi.org/10.1117/12.795643

KEYWORDS: Mirrors, X-rays, Photography, X-ray lasers, Free electron lasers, X-ray technology, Hard x-rays, Particles, Stitching interferometry, Synchrotron technology

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Proceedings Article | 3 September 2008 Paper

Development of adaptive mirror for wavefront correction of hard x-ray nanobeam

Takashi Kimura, Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Daisuke Yamakawa, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 7077, 707709 (2008) https://doi.org/10.1117/12.796029

KEYWORDS: Mirrors, X-rays, Wavefronts, Ceramics, Hard x-rays, Silicon, Fizeau interferometers, X-ray optics, Optical simulations, Optical components

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Proceedings Article | 3 September 2008 Paper

Multi-plate crystal cavity with compound refractive lenses

S.-Y. Chen, Y.-Y. Chang, M.-T. Tang, Yu. Stetsko, M. Yabashi, H.-H. Wu, Y.-R. Lee, B.-Y. Shew, S.-L. Chang

Proceedings Volume 7077, 70770J (2008) https://doi.org/10.1117/12.793494

KEYWORDS: Crystals, Diffraction, X-rays, Lenses, Laser crystals, X-ray diffraction, Silicon, Resonators, Absorption, Semiconducting wafers

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Proceedings Article | 1 October 2007 Paper

Hard x-ray wavefront measurement and control for hard x-ray nanofocusing

Soichiro Handa, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6704, 670404 (2007) https://doi.org/10.1117/12.733749

KEYWORDS: Mirrors, Wavefronts, Hard x-rays, X-rays, Platinum, Metrology, Sputter deposition, Multilayers, Interferometry, Spherical lenses

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Proceedings Article | 20 September 2007 Paper

Characterization of beryllium and CVD diamond for synchrotron radiation beamline windows and x-ray beam monitor

S. Goto, S. Takahashi, T. Kudo, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa

Proceedings Volume 6705, 67050H (2007) https://doi.org/10.1117/12.735356

KEYWORDS: Beryllium, X-rays, Diamond, Chemical vapor deposition, Polishing, X-ray imaging, Image transmission, Synchrotron radiation, Diffraction, Surface finishing

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Proceedings Article | 20 September 2007 Paper

Reflective optics for sub-10nm hard x-ray focusing

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 6705, 67050L (2007) https://doi.org/10.1117/12.734752

KEYWORDS: Mirrors, X-rays, Multilayers, Hard x-rays, X-ray optics, Reflectivity, Reflection, Diffraction, X-ray diffraction, Optical design

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Proceedings Article | 18 May 2007 Paper

Optics development for Japanese XFEL project

Makina Yabashi, Atsushi Higashiya, Kenji Tamasaku, Hiroaki Kimura, Togo Kudo, Haruhiko Ohashi, Sunao Takahashi, Shunji Goto, Tetsuya Ishikawa

Proceedings Volume 6586, 658605 (2007) https://doi.org/10.1117/12.724318

KEYWORDS: Silicon carbide, Diamond, Silicon, Optical components, Beryllium, Mirrors, X-rays, X-ray optics, Free electron lasers, Monochromators

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Proceedings Article | 29 August 2006 Paper

Wave-optical simulations for designing and evaluating hard x-ray reflective optics

H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 6317, 631718 (2006) https://doi.org/10.1117/12.681944

KEYWORDS: Mirrors, X-ray optics, X-rays, Hard x-rays, Reflectivity, Satellites, X-ray sources, Geometrical optics, Optical simulations, Beam shaping

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Proceedings Article | 29 August 2006 Paper

High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631719 (2006) https://doi.org/10.1117/12.681964

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Microscopes, Spatial resolution, Visualization, Gallium, Gold, Hard x-rays, Light sources

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Proceedings Article | 29 August 2006 Paper

At-wavelength figure metrology of total reflection mirrors in hard x-ray region

Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631709 (2006) https://doi.org/10.1117/12.681587

KEYWORDS: Mirrors, Metrology, X-rays, Hard x-rays, Optical design, Phase retrieval, Diffraction, Reflection, Multilayers, Photovoltaics

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Proceedings Article | 17 September 2005 Paper

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 5921, 59210M (2005) https://doi.org/10.1117/12.623103

KEYWORDS: Mirrors, Spatial resolution, X-rays, Particles, Multispectral imaging, Head, Hard x-rays, Interferometry, Computing systems, X-ray imaging

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Proceedings Article | 31 August 2005 Paper

Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5918, 591804 (2005) https://doi.org/10.1117/12.623035

KEYWORDS: Mirrors, X-rays, Tolerancing, Diffraction, Hard x-rays, X-ray optics, Microscopes, Spatial resolution, Autocollimators, X-ray microscopy

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Proceedings Article | 18 October 2004 Paper

Microstitching interferometry for nanofocusing mirror optics

Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567511

KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, X-rays, Hard x-rays, Fringe analysis, Superposition, Stitching interferometry, Spatial resolution

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Proceedings Article | 18 October 2004 Paper

Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Satoshi Matsuyama, Hirokatsu Yumoto, Kazumasa Ueno, Masafumi Shibahara, Katsuyoshi Endo, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567501

KEYWORDS: Mirrors, Hard x-rays, X-rays, Electrodes, Head, Plasma, X-ray optics, Manufacturing, Metrology, Platinum

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Proceedings Article | 18 October 2004 Paper

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567515

KEYWORDS: Mirrors, X-rays, Hard x-rays, X-ray optics, Optical alignment, X-ray microscopy, Optical simulations, Geometrical optics, Actuators, Mirror pointing

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Proceedings Article | 13 January 2004 Paper

Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, Yukihito Ishizaka

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.515127

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Plasma, Electrodes, X-ray optics, Beam shaping, X-ray technology, Chemical reactions, Hard x-rays

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Proceedings Article | 13 January 2004 Paper

Development of a figure correction method having spatial resolution close to 0.1 mm

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.520825

KEYWORDS: Mirrors, X-rays, X-ray imaging, Spatial resolution, X-ray technology, Optical simulations, Multispectral imaging, Particles, Interferometers, Surface finishing

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