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1 August 2021 Optimization of mirror deformation strategy using mechanical and piezoelectric bending system
Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, Kazuto Yamauchi
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Proceedings Volume 11837, Advances in X-Ray/EUV Optics and Components XVI; 118370B (2021) https://doi.org/10.1117/12.2594944
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States
Abstract
We have developed an X-ray zoom condenser optical system using deformable mirrors that can adjust the beam size by deformation of their shape. The shapes of deformable mirrors are changed by a combination of mechanical and piezoelectric bending. Large deformations up to third order polynomials are achieved by mechanical bending. More precise shapes are achieved by piezoelectric bimorph mirror. However, because both ends of the mirror are mechanically clamped, capability of deformation by piezoelectric bending is lower than that of free-standing piezoelectric bimorph mirrors. So, we propose a bending method that tunes the mechanical bending conditions to intentionally leave the optimized shape error to be easily compensated by the piezoelectric bending process.
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Takato Inoue, Yuka Nishioka, Satoshi Matsuyama, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Lahsen Assoufid, and Kazuto Yamauchi "Optimization of mirror deformation strategy using mechanical and piezoelectric bending system", Proc. SPIE 11837, Advances in X-Ray/EUV Optics and Components XVI, 118370B (1 August 2021); https://doi.org/10.1117/12.2594944
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KEYWORDS
Mirrors
Deformable mirrors
X-rays
Beam controllers
Control systems
Statistical analysis
Synchrotron radiation
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