Image-based wavefront measurement for full-field x-ray microscopy

Yuto Tanaka; Satoshi Matsuyama; Takato Inoue; Nami Nakamura; Jumpei Yamada; Yoshiki Kohmura; Makina Yabashi; Kazuhiko Omote; Tetsuya Ishikawa; Kazuto Yamauchi

doi:10.1117/12.2595026

1 August 2021 Image-based wavefront measurement for full-field x-ray microscopy

Yuto Tanaka, Satoshi Matsuyama, Takato Inoue, Nami Nakamura, Jumpei Yamada, Yoshiki Kohmura, Makina Yabashi, Kazuhiko Omote, Tetsuya Ishikawa, Kazuto Yamauchi

Author Affiliations +

Proceedings Volume 11839, X-Ray Nanoimaging: Instruments and Methods V; 118390A (2021) https://doi.org/10.1117/12.2595026
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

A wavefront measurement method in the microscope (magnifying) geometry can help achieve the required high accuracy for deformable mirrors. This study proposes an image-based wavefront measurement method based on a series of images of a small area near the focus. In this method, phase retrieval calculation using multiple images is performed. A proof-of-concept experiment was performed using multilayer AKB mirrors and an FZP to form the small area. Consequently, wavefront aberration was successfully retrieved using 60 images of a 30-nm-diameter area near the focus.

Conference Presentation

Citation Download Citation

Yuto Tanaka, Satoshi Matsuyama, Takato Inoue, Nami Nakamura, Jumpei Yamada, Yoshiki Kohmura, Makina Yabashi, Kazuhiko Omote, Tetsuya Ishikawa, and Kazuto Yamauchi "Image-based wavefront measurement for full-field x-ray microscopy", Proc. SPIE 11839, X-Ray Nanoimaging: Instruments and Methods V, 118390A (1 August 2021); https://doi.org/10.1117/12.2595026

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