Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori; Kazuto Yamauchi; Kazuya Yamamura; Hidekazu Mimura; Yasuhisa Sano; Akira Saito; Katsuyoshi Endo; Alexei Souvorov; Makina Yabashi; Kenji Tamasaku; Tetsuya Ishikawa; Mari Shimura; Yukihito Ishizaka

doi:10.1117/12.515127

13 January 2004 Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, Yukihito Ishizaka

Author Affiliations +

Proceedings Volume 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications; (2004) https://doi.org/10.1117/12.515127
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We developed ultra-precise fabrication system for x-ray optics, which combined numerically controlled plasma CVM and EEM. In this system, nanometer order form accuracy having atomic order roughness is achieved. And there are no deformed layers on the surface because these fabrication processes utilizes chemical reaction. So, this system is effective for not only reflective optics but also for diffractive optics. Recently, elliptical mirrors having less than 3 nm form accuracy are fabricated by utilizing the above system, and K-B arrangement microfocusing unit for installation of these mirrors are developed. In this unit, micro x-ray beam having the size of 180 (V)×90(H) nm² is achieved at 15 keV. By scanning irradiation of the micro x-ray beam and by detecting x-ray fluorescence, inside structures of some mammalian cells are observed with resolution of 0.2 μm.

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Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, and Yukihito Ishizaka "Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy", Proc. SPIE 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, (13 January 2004); https://doi.org/10.1117/12.515127

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