The Soft X-Ray Performance Of Plane And Figured Ni-Ac Multilayer Mirrors

Brian L. Evans; Ali M.H. Al -Arab; Shi Xu

doi:10.1117/12.962641

28 July 1989 The Soft X-Ray Performance Of Plane And Figured Ni-Ac Multilayer Mirrors

Brian L. Evans, Ali M.H. Al -Arab, Shi Xu

Proceedings Volume 1160, X-Ray/EUV Optics for Astronomy and Microscopy; (1989) https://doi.org/10.1117/12.962641
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

In multilayer assemblies consisting of alternating high and low absorption index materials the strongly absorbing (metal) component layer is usually microcrystalline. The crystallite size influences the soft X-ray reflectivity of the stack by determining the effective reflecting area of the stack and the diffuse scattering contribution. The influence of the deposition parameters on the structure of ion-beam sputtered Ni and a-C films is described together with the associated multilayer soft X-ray reflectivity spectra as a function of sputtering energy, d-spacing and film thickness ratio.

Citation Download Citation

Brian L. Evans, Ali M.H. Al -Arab, and Shi Xu "The Soft X-Ray Performance Of Plane And Figured Ni-Ac Multilayer Mirrors", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962641

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available