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Near normal incidence imaging optics for use at wavelengths A in the 'water
window' (2.4X4.4nm) utilise the in-phase reflections from a multilayer stack
deposited on a figured substrate. The reflectivity of such a multilayer depends
upon the number N of contributing interfaces and the amplitude reflectivity r at
each interface where r M + ituz is determined by the difference in the real and
imaginary parts of the refractive indices of the media defining the interface.
Thus r may be predominantly determined by (Class I) or & (Class II) or a
combination of both (Class III).
The spectral variation of r (2 .3X4 .8nm) has been computed for interfaces
formed by a-C and fifty four different elements which are thereby classified
as I, II or III. The normal incidence reflectivity R versus A of representative
multilayers from each class has been calculated as a function of N and layer thickness
ratio 'y and criteria established for the most suitable choice of layer
materials for the 'water window' region. In practice the particulate nature of
the thin metal film components of the multilayer results in the experimental
values of R being much less than the theoretical values.
Shi Xu andBrian L. Evans
"Multilayer reflectors for the "water window"", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23184
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Shi Xu, Brian L. Evans, "Multilayer reflectors for the "water window"," Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23184