Vectorial 3D modeling of coherence scanning interferometry

Tobias Pahl; Sebastian Hagemeier; Marco Künne; Corvin Danzglock; Nils Reinhold; Ricky Schulze; Markus Siebert; Peter Lehmann

doi:10.1117/12.2592617

20 June 2021 Vectorial 3D modeling of coherence scanning interferometry

Tobias Pahl, Sebastian Hagemeier, Marco Künne, Corvin Danzglock, Nils Reinhold, Ricky Schulze, Markus Siebert, Peter Lehmann

Author Affiliations +

Proceedings Volume 11783, Modeling Aspects in Optical Metrology VIII; 117830G (2021) https://doi.org/10.1117/12.2592617
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

Coherence scanning interferometry is one of the most frequently used techniques for optical profiling due to its outstanding axial resolution. However, optical profilers suffer from systematic deviations caused by their transfer characteristics and diffraction effects occurring by means of light-surface interaction with measurement objects. In order to predict these deviations and to get better insight into the physical effects leading to their appearance, analytical and rigorous numerical models are applied. Usually, rigorous models provide higher accuracy whereas analytical models require less computational effort since the light-surface interaction is considered by a phase object approximation. We present a full vectorial three-dimensional modeling of coherence scanning interferometry based on the phase object approximation. Further, we compare three different common approaches using the phase object approximation, usually called Richards Wolf model, Foilmodel and Kirchhoff model. The comparison is validated with respect to rigorously simulated and measured results shown elsewhere.

Conference Presentation

Citation Download Citation

Tobias Pahl, Sebastian Hagemeier, Marco Künne, Corvin Danzglock, Nils Reinhold, Ricky Schulze, Markus Siebert, and Peter Lehmann "Vectorial 3D modeling of coherence scanning interferometry", Proc. SPIE 11783, Modeling Aspects in Optical Metrology VIII, 117830G (20 June 2021); https://doi.org/10.1117/12.2592617

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