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Nils Reinhold
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Publications (1)
Proceedings Article | 20 June 2021 Presentation + Paper
Vectorial 3D modeling of coherence scanning interferometry
Proceedings Volume 11783, 117830G (2021) https://doi.org/10.1117/12.2592617
KEYWORDS: 3D modeling, Interferometry, Optical testing, Finite element methods, Device simulation, 3D metrology, Scattering, Polarization, Microscopy, Instrument modeling
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