Mirror figure correction on variable length scales

Ch. Morawe; P. Bras; S. Labouré; F. Perrin; A. Vivo

doi:10.1117/12.2595034

21 September 2021 Mirror figure correction on variable length scales

Ch. Morawe, P. Bras, S. Labouré, F. Perrin, A. Vivo

Proceedings Volume 11837, Advances in X-Ray/EUV Optics and Components XVI; 118370C (2021) https://doi.org/10.1117/12.2595034
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

The figure errors of an x-ray mirror were reduced by differential deposition of C/Pt layered structures. Different apertures were inserted into the particle beam to correct height errors on variable length scales down to less than 10 mm. The required velocity profile was calculated using a deconvolution algorithm. The film thickness profiles were measured directly by xray reflectivity. Height errors were evaluated using visible light surface metrology. The results of these different techniques are compared and discussed. After two iterations the shape error of a 300 mm long flat Si mirror was reduced by a factor of 5 to less than 1 nm RMS. This work describes the experimental techniques and discusses the achieved accuracy. It also addresses open questions such as roughness evolution, layer stress, and the interpretation of metrology data.

Conference Presentation

Citation Download Citation

Ch. Morawe, P. Bras, S. Labouré, F. Perrin, and A. Vivo "Mirror figure correction on variable length scales", Proc. SPIE 11837, Advances in X-Ray/EUV Optics and Components XVI, 118370C (21 September 2021); https://doi.org/10.1117/12.2595034

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