A multimodal method for defect characterization of large-aperture optics

Jian Chen; Weiyang Yu; Haifeng Zhou; Jian Zhang; Xi Wang; Wenyang Xu; Ming Huang

doi:10.1117/12.2603703

9 October 2021 A multimodal method for defect characterization of large-aperture optics

Jian Chen, Weiyang Yu, Haifeng Zhou, Jian Zhang, Xi Wang, Wenyang Xu, Ming Huang

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118990D (2021) https://doi.org/10.1117/12.2603703
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

It is very challenging to characterize surface/sub-surface defects for large-aperture optics. The first challenge is the conflict between high resolution and large field of view, namely how to reach a good balance between high resolution and high efficiency for detecting various defects with sub-micronover the meter-size surface of optics. The second challenge is how to classify defects accurately, which is very important for determining origin of defects and improving optics quality.In this paper, a multimodal inspection technique for surface/sub-surface defects of large-aperture optics is reported, in which a high speed laser scattering imaging with a sensitivity at 200-nm scale is used for defect discovery of large-aperture optics. The defect discovery provides a statistical result of defects of the optics. After that, a multifunctional microscopic method is used for local defect review. A photo thermal scanning microscopy is used for specific characterization of absorption defects, and a confocal microscopy is used for characterization of sub-surface defects. The defect review provides information for defect classification. Based on this multimodal technique, an inspection system is also developed and used for defect characterization of large optics.

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Jian Chen, Weiyang Yu, Haifeng Zhou, Jian Zhang, Xi Wang, Wenyang Xu, and Ming Huang "A multimodal method for defect characterization of large-aperture optics", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118990D (9 October 2021); https://doi.org/10.1117/12.2603703

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KEYWORDS

Laser scattering

Confocal microscopy

Scattering

Optics manufacturing

Defect inspection

Laser induced damage

Microscopy

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