Preparation and optical properties of diamond thin films based on fused silica substrates

Qiao Liu; Kesheng Guo; Qiang Hu; Shaoyi Hou; Yongneng Xiao; Lang Hu

doi:10.1117/12.2645857

11 August 2022 Preparation and optical properties of diamond thin films based on fused silica substrates

Qiao Liu, Kesheng Guo, Qiang Hu, Shaoyi Hou, Yongneng Xiao, Lang Hu

Proceedings Volume 12307, Second Optics Frontier Conference (OFS 2022); 123070J (2022) https://doi.org/10.1117/12.2645857
Event: Second Optics Frontier Conference 2022, 2022, ONLINE, China

Abstract

Diamond and diamond film have excellent performance in optics, electricity, mechanics, chemical stability, etc. Compared with bulk materials, diamond film has low cost and short preparation period, and has good laser damage characteristics, which can replace traditional films to achieve high performance. The laserinduced damage threshold, optical properties and morphology of diamond films are closely related to the growth conditions. In this paper, high-quality diamond films suitable for laser applications were grown on the surface of fused silica by microwave plasma chemical vapor deposition, and the effects of gas flow ratio and temperature on the optical properties of diamond films were studied. The effect of particle morphology on electric field and temperature field. Studies have shown that the growth quality of nanocrystalline diamond films is closely related to the flow ratio of methane/hydrogen and the growth temperature. When the flow ratio of methane/hydrogen is 3%, and the growth temperature is around 800℃, the surface roughness of the film is the lowest. The diamond film shows a morphology of (111) facets, the grain size is in the 20~200nm range, and the transmittance can reach up to 70%. The simulation of the laser electric field and temperature rise with different surface grain shapes shows that the grains of (111) facet can cause the electric field to increase by 2~4 times, and the temperature rise reaches 40~60℃.

Citation Download Citation

Qiao Liu, Kesheng Guo, Qiang Hu, Shaoyi Hou, Yongneng Xiao, and Lang Hu "Preparation and optical properties of diamond thin films based on fused silica substrates", Proc. SPIE 12307, Second Optics Frontier Conference (OFS 2022), 123070J (11 August 2022); https://doi.org/10.1117/12.2645857

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