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Attenuated total reflection (ATR) spectroscopy is a powerful tool for the optical analysis of biomarkers in the mid-infrared spectral range. We study the signal-enhanced ATR spectroscopy of silicon ATR crystals using silicon micropillars etched on the active surface of the silicon crystal, where we use an effective-index approximation for the micropillar layer as the micropillars are much smaller than the optical wavelength. The reflectance, as well as the effective length due to using the micropillars are calculated as a function of wavelength using a model based on the Fresnel equations. The path length is shown to possibly increase by up to 10X due to using these pillars.
Ahmed M. Othman,Yasser M. Sabry,Diaa Khalil, andTarik Bourouina
"Numerical modelling for micropillar-enhanced silicon ATR crystals for mid-infrared spectroscopy of biomarkers", Proc. SPIE 12387, Optical Diagnostics and Sensing XXIII: Toward Point-of-Care Diagnostics, 123870J (16 March 2023); https://doi.org/10.1117/12.2649104
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Ahmed M. Othman, Yasser M. Sabry, Diaa Khalil, Tarik Bourouina, "Numerical modelling for micropillar-enhanced silicon ATR crystals for mid-infrared spectroscopy of biomarkers," Proc. SPIE 12387, Optical Diagnostics and Sensing XXIII: Toward Point-of-Care Diagnostics, 123870J (16 March 2023); https://doi.org/10.1117/12.2649104