Production of dielectric filters with low defect levels for integrated optical devices

Stephan Mingels; Navas Kutty; Nicolaas Tack; Dries Bangels; Elias Janssens; Harro Hagedorn

doi:10.1117/12.2667774

17 March 2023 Production of dielectric filters with low defect levels for integrated optical devices

Stephan Mingels, Navas Kutty, Nicolaas Tack, Dries Bangels, Elias Janssens, Harro Hagedorn

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 124241J (2023) https://doi.org/10.1117/12.2667774
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We have assessed and reduced the particle count in coatings from a magnetron sputter coater used for production of optical coatings for applications in photonics and semiconductor industry. Results for particle levels in single layers from Al₂O₃, SiO₂, Nb₂O₅, Ta₂O₅, and TiO₂ showed semiconductor grade particle levels for the upgraded deposition system. Moreover, particle levels were also investigated for optical filter stacks deposited on bare Si, glass substrates and actual CMOS device wafers, which were used for the manufacturing of hyperspectral imaging (HSI) sensors. In all cases, low particle counts were detected in the optical filters as expected from the results obtained for the single layer. It could be shown that the coating on the device wafers had no negative impact on the production yield of the HSI sensors.

Citation Download Citation

Stephan Mingels, Navas Kutty, Nicolaas Tack, Dries Bangels, Elias Janssens, and Harro Hagedorn "Production of dielectric filters with low defect levels for integrated optical devices", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 124241J (17 March 2023); https://doi.org/10.1117/12.2667774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available