Cathodoluminescence imaging for nanoscale optical analysis of microLEDs

T. Coenen

doi:10.1117/12.2646678

14 March 2023 Cathodoluminescence imaging for nanoscale optical analysis of microLEDs

T. Coenen

Proceedings Volume 12441, Light-Emitting Devices, Materials, and Applications XXVII; 124410C (2023) https://doi.org/10.1117/12.2646678
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Structured LED materials such as micro/nanowires are highly promising as they enable superior light outcoupling, tunable directionality and have a small footprint for demanding display applications. In such nanostructured devices, individual electrical contacting and analysis is a tedious and complicated process. Spatially-resolved cathodoluminescence (CL) spectroscopy, in which the electron-beam-induced radiation is collected inside an electron microscope, holds great potential for contactless nanoscale optoelectronic material inspection of semiconductor materials. Conventionally, CL experiments focused on measuring the intensity and spectral content of the light but recently there have been several relevant advancements in the CL technique. Here, we will describe some of those developments.

Conference Presentation

Citation Download Citation

T. Coenen "Cathodoluminescence imaging for nanoscale optical analysis of microLEDs", Proc. SPIE 12441, Light-Emitting Devices, Materials, and Applications XXVII, 124410C (14 March 2023); https://doi.org/10.1117/12.2646678

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