Design-technology co-optimization overview of CFET architecture

G. Mirabelli; P. Schuddinck; H.-H. Liu; S. Yang; O. Zografos; S. M. Salahuddin; P. Weckx; G. Hiblot; G. Hellings; J. Ryckaert

doi:10.1117/12.2657726

28 April 2023 Design-technology co-optimization overview of CFET architecture

G. Mirabelli, P. Schuddinck, H.-H. Liu, S. Yang, O. Zografos, S. M. Salahuddin, P. Weckx, G. Hiblot, G. Hellings, J. Ryckaert

Author Affiliations +

Proceedings Volume 12495, DTCO and Computational Patterning II; 124950M (2023) https://doi.org/10.1117/12.2657726
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Fin depopulation, thinner and taller fins, and the step towards Nanosheet technologies has been helping in maintaining the rhythm of the semiconductor technology roadmap. Nevertheless, further area scaling causes a drastic reduction in active width as well as a challenging routability. On this regard, the Complementary-FET is a strong contender as device for next generation technologies. The stack of p- on n-FETs offers several opportunities for device scaling and optimization. However, it also poses several challenges that need to be carefully analyzed in a design-technology cooptimization framework.

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Citation Download Citation

G. Mirabelli, P. Schuddinck, H.-H. Liu, S. Yang, O. Zografos, S. M. Salahuddin, P. Weckx, G. Hiblot, G. Hellings, and J. Ryckaert "Design-technology co-optimization overview of CFET architecture", Proc. SPIE 12495, DTCO and Computational Patterning II, 124950M (28 April 2023); https://doi.org/10.1117/12.2657726

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