Demonstration of a monolithic npn and pnp complementary HBT technology

David B. Slater Jr.; Paul J. Enquist; Fayez E. Najjar; Mary Y. Chen; James A. Hutchby

doi:10.1117/12.20910

1 August 1990 Demonstration of a monolithic npn and pnp complementary HBT technology

David B. Slater Jr., Paul J. Enquist, Fayez E. Najjar, Mary Y. Chen, James A. Hutchby

Proceedings Volume 1288, High-Speed Electronics and Device Scaling; (1990) https://doi.org/10.1117/12.20910
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

The monolithic integration of complementary AlGaAs/GaAs heterojunction bipolar transistors (HBTs) has been accomplished using selective MOVPE to regrow an Npn HBT on a Pnp HBT waler. A non-self- aligned mesa process was used in fabricating the transistors. Pnps (Npns) with a. minimum geometry emitter of 6?m by 12?m yielded a current gain of 300 (75) which was not degraded by the regrowth process and an ft of 2.5 (22) GHz. An inverting amplifier with feedback for unity gain, a push-pull emitter follower and a complementary Gilbert Gain Cell amplifier were fabricated and tested indicating the feasibility for high speed (Al)GaAs HBT operational amplifiers (op-amps).

Citation Download Citation

David B. Slater Jr., Paul J. Enquist, Fayez E. Najjar, Mary Y. Chen, and James A. Hutchby "Demonstration of a monolithic npn and pnp complementary HBT technology", Proc. SPIE 1288, High-Speed Electronics and Device Scaling, (1 August 1990); https://doi.org/10.1117/12.20910

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