High-sensitivity mid-wave resonant cavity infrared detectors

C. S. Kim; M. Kim; C. L. Canedy; E. M. Jackson; C. T Ellis; R. L. Espinola; J. A. Nolde; E. H. Aifer; I. Vurgaftman; J. R. Meyer; V. Jayaraman; B. Kolasa; C. Burgner; B. Knipfer; R. Marsland

doi:10.1117/12.3003022

8 March 2024 High-sensitivity mid-wave resonant cavity infrared detectors

C. S. Kim, M. Kim, C. L. Canedy, E. M. Jackson, C. T Ellis, R. L. Espinola, J. A. Nolde, E. H. Aifer, I. Vurgaftman, J. R. Meyer, V. Jayaraman, B. Kolasa, C. Burgner, B. Knipfer, R. Marsland

Author Affiliations +

Proceedings Volume 12895, Quantum Sensing and Nano Electronics and Photonics XX; 128950C (2024) https://doi.org/10.1117/12.3003022
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Resonant cavity infrared detectors (RCIDs) can reduce the noise in sensing a laser signal by strongly suppressing background photocurrent at wavelengths outside the narrow spectral band of interest. We recently reported an RCID with 100-nm-thick InAsSb/InAs absorber, GaAs/AlGaAs bottom mirror, and Ge/SiO₂ top mirror. At T = 300 K, the external quantum efficiency reached 58% atλ_res ≈ 4.6 μm, with linewidth δλ = 27 nm. The characteristics at 125 K implied a specific detectivity of 5.5 × 10¹² cm Hz^½/W, which is more than 3× higher than for a state-of-the-art broadband HgCdTe device operating at that temperature. However, a prominent variation with mesa diameter of the deposited Ge spacer thickness made it difficult to predictably control λ_res for devices processed with a given diameter. This has been addressed by measuring the reflectivity spectrum following deposition of the spacer, so that thicknesses of the top mirror’s SiO₂ and Ge layers could be adjusted appropriately to attain a targeted resonance. This was especially beneficial in matching the λ_res for a small mesa, needed to minimize the capacitance in high-frequency measurements, to the emission wavelength of a given ewquantum cascade laser.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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C. S. Kim, M. Kim, C. L. Canedy, E. M. Jackson, C. T Ellis, R. L. Espinola, J. A. Nolde, E. H. Aifer, I. Vurgaftman, J. R. Meyer, V. Jayaraman, B. Kolasa, C. Burgner, B. Knipfer, and R. Marsland "High-sensitivity mid-wave resonant cavity infrared detectors", Proc. SPIE 12895, Quantum Sensing and Nano Electronics and Photonics XX, 128950C (8 March 2024); https://doi.org/10.1117/12.3003022

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