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13 March 2024 Monolithic beam combined quantum cascade laser arrays with integrated arrayed waveguide gratings
Tushar Sanjay Karnik, Laurent Diehl, Khoi Phuong Dao, Qingyang Du, Christian Pfluegl, Daryoosh Vakhshoori, Juejun Hu
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Proceedings Volume 12905, Novel In-Plane Semiconductor Lasers XXIII; 129050L (2024) https://doi.org/10.1117/12.3000223
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
We report the fabrication of a monolithic closed-loop wavelength beam combined quantum cascade laser (QCL) source. The chip comprises five QCL gain sections connected to 5 × 1 arrayed waveguide gratings (AWG) via active/passive tapered couplers and a router. The chip is fabricated on a MOCVD-grown III-V semiconductor substrate. The entire passive section of the chip undergoes ion implantation to reduce the propagation losses due to free carrier absorption. The peak power for all the QCL array elements reached 600 mW per facet with a 2 kA/cm2 threshold current density under pulsed operation. Furthermore, our WBC approach is compatible with buried heterostructure processing, which allows continuous wave operation with high output power. Our results hold promise in manufacturing compact and multiwavelength mid-infrared sources with good beam quality.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Tushar Sanjay Karnik, Laurent Diehl, Khoi Phuong Dao, Qingyang Du, Christian Pfluegl, Daryoosh Vakhshoori, and Juejun Hu "Monolithic beam combined quantum cascade laser arrays with integrated arrayed waveguide gratings", Proc. SPIE 12905, Novel In-Plane Semiconductor Lasers XXIII, 129050L (13 March 2024); https://doi.org/10.1117/12.3000223
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KEYWORDS
Quantum cascade lasers
Arrayed waveguide gratings
Mid infrared
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