Research on hypotenuse-face measurement method of rectangular-prism based on oblique incidence

Guibo Zhu; Yating Wen

doi:10.1117/12.3011165

1 November 2023 Research on hypotenuse-face measurement method of rectangular-prism based on oblique incidence

Guibo Zhu, Yating Wen

Proceedings Volume 12917, International Conference on Precision Instruments and Optical Engineering (PIOE 2023); 129170B (2023) https://doi.org/10.1117/12.3011165
Event: 3rd International Conference on Precision Instruments and Optical Engineering (PIOE 2023), 2023, Shanghai, China

Abstract

The oblique incidence measurement system that can eliminate multiple interference background interference in the measurement of the hypotenuse-face of rectangular-prism is studied, and an upright oblique incidence measurement device that can directly measure the hypotenuse-face of rectangular-prism is designed. The device includes a phase-shift interferometer host, integrated loading table and a pair of reference flats. The multiple interference background errors caused by the ray cluster caused by the reflection of the rectangular surface are discussed. The method of 3D deflection is used to avoid the interference of the total internal reflection ray to the measurement of the hypotenuse-face of the rectangular-prism. An upright phase-shift interferometer based on oblique incidence was assembled, and the optical path adjustment and parameter calibration were completed. The measurement of the hypotenuse-face of the rectangular-prism was realized. The white light profiler was used to measure the hypotenuse-face of the measured prism, and the results were consistent. It solves the measurement problem of the rectangular-prism strips, realizes the industrialized online measurement of microprisms, and has important applications in the processing of rectangular-prisms

Citation Download Citation

Guibo Zhu and Yating Wen "Research on hypotenuse-face measurement method of rectangular-prism based on oblique incidence", Proc. SPIE 12917, International Conference on Precision Instruments and Optical Engineering (PIOE 2023), 129170B (1 November 2023); https://doi.org/10.1117/12.3011165

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KEYWORDS

Interferometers

Prisms

Reflection

Phase shifts

Crystals

Total internal reflection

Internal reflection

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