STED-inspired optical lithography beyond acrylates

Sourav Islam; Georgii Gvindzhiliia; Thomas A. Klar

doi:10.1117/12.3022378

18 June 2024 STED-inspired optical lithography beyond acrylates

Sourav Islam, Georgii Gvindzhiliia, Thomas A. Klar

Author Affiliations +

Proceedings Volume 12995, 3D Printed Optics and Additive Photonic Manufacturing IV; 1299503 (2024) https://doi.org/10.1117/12.3022378
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

STED-inspired sub-diffractional nanolithography was so far restricted to free radical polymerization, predominantly of (meth)acrylates. We now expand the STED-inspired toolkit to cationic and oxidative polymerization, comprising the technologically important classes of epoxides and π-conjugated polymers. In both cases, we achieved structure sizes below 100 nm using transient state absorption depletion (TAD) in systems comprising onium salts as initiators and photosensitizers that can be depleted by transient state absorption.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Sourav Islam, Georgii Gvindzhiliia, and Thomas A. Klar "STED-inspired optical lithography beyond acrylates", Proc. SPIE 12995, 3D Printed Optics and Additive Photonic Manufacturing IV, 1299503 (18 June 2024); https://doi.org/10.1117/12.3022378

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