Simulation of the early stages of thin film formation and columnar growth

Mihai A. Popescu

doi:10.1117/12.22421

1 December 1990 Simulation of the early stages of thin-film formation and columnar growth

Mihai A. Popescu

Proceedings Volume 1324, Modeling of Optical Thin Films II; (1990) https://doi.org/10.1117/12.22421
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Computer simulations of the structure of 13-atom metallic clusters formed by deposition on crystalline and non-crystalline substrates were carried out. The formation of discontinuous thin films during vapor deposition and the growth of bidimensional columns were simulated.

Citation Download Citation

Mihai A. Popescu "Simulation of the early stages of thin-film formation and columnar growth", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22421

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