A quasi-common-path heterodyne grating interferometer for six-degree-of-freedom measurement

Can Cui; Menghan Yang; Lifu Liu; Pengbo Zhao; Lvye Gao; Xinghui Li

doi:10.1117/12.3036386

20 November 2024 A quasi-common-path heterodyne grating interferometer for six-degree-of-freedom measurement

Can Cui, Menghan Yang, Lifu Liu, Pengbo Zhao, Lvye Gao, Xinghui Li

Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132410G (2024) https://doi.org/10.1117/12.3036386
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China

Abstract

The six degree-of-freedom (DOF) measurement is of significant importance in precision engineering and scientific research, especially in fields such as aerospace, manufacturing, and robotics. Among various measurement techniques, heterodyne grating interferometry stands out due to its high precision, strong anti-interference capabilities, and ease of multi DOF expansion. However, existing methods have some issues: firstly, polarization and frequency aliasing can lead to high periodic non-linear errors, affecting measurement accuracy. Secondly, it is difficult to achieve six DOF measurement while ensuring miniaturization and high precision. To address these issues, we presents a heterodyne-based six DOF measurement grating interferometer, achieving sub-nanometer precision. By employing a heterodyne (dual-frequency) grating interferometry technique, the measurement accuracy is significantly enhanced. The system offers comprehensive spatial measurement capabilities, with 3-DOF displacement measured using interference signals from two-dimensional gratings and 3-DOF angular measurements derived from spot displacement on a quadrant photodetector. To address error reduction, a quasi-common optical path design minimizes polarization/frequency mixing-induced nonlinear periodic errors and optical dead zone effects, reducing measurement error to sub-nanometer levels. Additionally, a compact system design is realized. These innovations enhance the performance and applicability of precision measurement technologies, offering strong support for advancements in the field. Overall, the proposed system achieves sub-nanometer precision, 6-DOF measurement, low error levels, and compact design.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Can Cui, Menghan Yang, Lifu Liu, Pengbo Zhao, Lvye Gao, and Xinghui Li "A quasi-common-path heterodyne grating interferometer for six-degree-of-freedom measurement", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132410G (20 November 2024); https://doi.org/10.1117/12.3036386

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Optical gratings

Interferometers

Diffraction gratings

Heterodyning

Precision measurement

Lasers

Polarized light

Show All Keywords

Keywords/Phrases

Search In:

Publication Years