Prof. Xinghui Li
at Tsinghua Univ Shenzhen International Graduate School
SPIE Involvement:
Author
Publications (56)

Proceedings Article | 8 November 2024 Paper
Xiang Gao, Zijian Zhong, Tianshi Lu, Jingwen Li, Xinghui Li
Proceedings Volume 13234, 1323409 (2024) https://doi.org/10.1117/12.3036399
KEYWORDS: Diffraction gratings, Optical gratings, Mirrors, Fabrication, Diffraction, Wavefronts, Wavefront errors, Holography, Microscopes, Ferroelectric materials

Proceedings Article | 8 November 2024 Paper
Shuonan Shan, Zijian Zhong, Tianshi Lu, Xinghui Li
Proceedings Volume 13234, 1323407 (2024) https://doi.org/10.1117/12.3036345
KEYWORDS: Optical alignment, Optical gratings, Lithography, Reflection gratings, Reflection, Ferroelectric materials, Error analysis, Signal processing, Semiconductor manufacturing, Light sources

Proceedings Article | 8 November 2024 Paper
Hao Jiang, Yibo Xing, Weijian Shi, Min Han, Xiaohao Wang, Xinghui Li
Proceedings Volume 13233, 1323304 (2024) https://doi.org/10.1117/12.3036358
KEYWORDS: 3D modeling, 3D projection, Interpolation, Modulation, Field programmable gate arrays, Reconstruction algorithms, Mirrors, Microelectromechanical systems, Phase shift keying

Proceedings Article | 28 November 2023 Poster + Paper
Shuonan Shan, Tianshi Lu, Fuyuang Deng, Xiaohao Wang, Xinghui Li
Proceedings Volume 12765, 1276524 (2023) https://doi.org/10.1117/12.2691160
KEYWORDS: Optical gratings, Optical alignment, Fabrication, Lithography, Diffraction gratings, Reflection, Overlay metrology, Holography, Finite-difference time-domain method, Stray light

Proceedings Article | 27 November 2023 Paper
Proceedings Volume 12767, 1276708 (2023) https://doi.org/10.1117/12.2689364
KEYWORDS: Visualization, Visible radiation, Cameras, Pose estimation, Light sources and illumination, Motion measurement, Information visualization, Light sources, Motion estimation, Servomechanisms

Showing 5 of 56 publications
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