Corrections of aberrations using HOEs in UV and visible imaging systems

Zishao Yang; Klaus-Juergen Rosenbruch

doi:10.1117/12.47954

1 January 1991 Corrections of aberrations using HOEs in UV and visible imaging systems

Zishao Yang, Klaus-Juergen Rosenbruch

Proceedings Volume 1354, 1990 Intl Lens Design Conf; (1991) https://doi.org/10.1117/12.47954
Event: 1990 International Lens Design Conference, 1990, Monterey, CA, United States

Abstract

Advantages and shortcomings of the use of HOE for imaging systems are demonstrated by examples: high aperture 1:1 and 5:1 imaging systems for the wavelength 193 nm to be used for lithography and an innovative achromatic holographic doublet. 1.

Citation Download Citation

Zishao Yang and Klaus-Juergen Rosenbruch "Corrections of aberrations using HOEs in UV and visible imaging systems", Proc. SPIE 1354, 1990 Intl Lens Design Conf, (1 January 1991); https://doi.org/10.1117/12.47954

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