Reduced thermal budget processing of high-Tc superconducting thin films and related materials by MOCVD

Sanjai Sinha; Rajendra Singh; N. J. Hsu; J. T. C. Ng; P. Chou; Jagdish Narayan

doi:10.1117/12.48975

1 March 1991 Reduced thermal budget processing of high-T_c superconducting thin films and related materials by MOCVD

Sanjai Sinha, Rajendra Singh, N. J. Hsu, J. T. C. Ng, P. Chou, Jagdish Narayan

Proceedings Volume 1394, Progress In High-Temperature Superconducting Transistors and Other Devices; (1991) https://doi.org/10.1117/12.48975
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Metal organic chemical vapor deposition (MOCVD) has the potential of emerging as a viable technique to fabricate ribbons, tapes, coated wires, and the deposition of films of high temperature superconductors, and related materials. As a reduced thermal budget processing technique, rapid isothermal processing (RIP) based on incoherent radiation as the source of energy can be usefully coupled to conventional MOCVD. In this paper we report on the deposition and characterization of high quality superconducting thin films of Y-Ba-Cu-O (YBCO) on MgO, SrTiO3, and YSZ substrates by RIP assisted MOCVD. Some preliminary results are also presented for the deposition of BaF2, Y203 and MgO on silicon substrates. It is envisaged that high energy photons from the incoherent light source and the use of a mixture of N2O and 02 as the oxygen source, assist chemical reactions and lower the overall thermal budget for processing of YBCO films.

Citation Download Citation

Sanjai Sinha, Rajendra Singh, N. J. Hsu, J. T. C. Ng, P. Chou, and Jagdish Narayan "Reduced thermal budget processing of high-T_c superconducting thin films and related materials by MOCVD", Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); https://doi.org/10.1117/12.48975

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