Study of impurities in CVD diamond using cathodoluminescence

Kazuhito Nishimura; Jing Sheng Ma; Yoshihiro Yokota; Yusuke Mori; Hiroshi Kotsuka; Takashi Hirao; Makoto Kitabatake; Masahiro Deguchi; Kazuo Ogawa; Gang Ning; Hiroshi Tomimori; Akio Hiraki

doi:10.1117/12.48294

1 December 1991 Study of impurities in CVD diamond using cathodoluminescence

Kazuhito Nishimura, Jing Sheng Ma, Yoshihiro Yokota, Yusuke Mori, Hiroshi Kotsuka, Takashi Hirao, Makoto Kitabatake, Masahiro Deguchi, Kazuo Ogawa, Gang Ning, Hiroshi Tomimori, Akio Hiraki

Author Affiliations +

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48294
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Nitrogen ions were implanted into diamond films formed by microwave plasma CVD. A color cathodoluminescence (CL) system were used to investigate the emission centers of as implanted and the subsequent annealed films. A zero-phono-line (ZPL) from the implanted N+ was observed at 3.19 eV. After annealing, a ZPL at 2.16 eV and a strong emission center in the violet region with a ZPL at 3.19 eV and phonon replicas were observed. The color CL images of the annealed films show that an orange-red color emission comes only from the {100} sectors because of the difference in crystal quality between the {100} and {111} sectors.

Citation Download Citation

Kazuhito Nishimura, Jing Sheng Ma, Yoshihiro Yokota, Yusuke Mori, Hiroshi Kotsuka, Takashi Hirao, Makoto Kitabatake, Masahiro Deguchi, Kazuo Ogawa, Gang Ning, Hiroshi Tomimori, and Akio Hiraki "Study of impurities in CVD diamond using cathodoluminescence", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48294

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available