Microlens array for staring infrared imager

Thomas R. Werner; J. Allen Cox; Steve Swanson; Michael Holz

doi:10.1117/12.49372

1 November 1991 Microlens array for staring infrared imager

Thomas R. Werner, J. Allen Cox, Steve Swanson, Michael Holz

Proceedings Volume 1544, Miniature and Micro-Optics: Fabrication and System Applications; (1991) https://doi.org/10.1117/12.49372
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

This paper describes the fabrication and testing of 64 X 96 arrays of microlenses used for fill-factor enhancement of uncooled infrared detector arrays. Each lenslet represents a f/0.9 Fresnel phase lens at 10 micrometers wavelength. All arrays were etched into silicon wafers as either 8-level or 16-level staircase kinoforms. When integrated with a detector array having 20 fill factor, these microlens arrays were capable of increasing the magnitude of the measured signal with f/2.2 fore-optics by 2.5-fold.

Citation Download Citation

Thomas R. Werner, J. Allen Cox, Steve Swanson, and Michael Holz "Microlens array for staring infrared imager", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); https://doi.org/10.1117/12.49372

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