Paper
28 July 1994 Fabrication and characterization of porous silicon light-emitting devices
Walter Lang, Frank Kozlowski, Peter Steiner
Author Affiliations +
Abstract
Electrochemically etched porous silicon shows luminescence. In this paper, the electroluminescence is investigated. The fabrication and the characterization of a light emitting diode is described.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Walter Lang, Frank Kozlowski, and Peter Steiner "Fabrication and characterization of porous silicon light-emitting devices", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180961
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KEYWORDS
Silicon

Luminescence

Electroluminescence

Quantum efficiency

Semiconducting wafers

Indium

Etching

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