Glancing incidence x-ray scattering by multilayers for x-UV mirrors

Jean-Pierre Chauvineau; Y. Chambet; C. Marliere

doi:10.1117/12.192078

4 November 1994 Glancing-incidence x-ray scattering by multilayers for XUV mirrors

Jean-Pierre Chauvineau, Y. Chambet, C. Marliere

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192078
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Periodic Mo/Si multilayers designed for X-UV mirrors were made by ion beam sputtering deposition on float-glass, polished borosilicate glass and superpolished silicon substrates. Glancing incidence X-ray scattering from these multilayers was measured at first by fixing the incidence angle and varying the detection angle, and then by simultaneously varying the incidence and detection angles in such a way that the phase difference between the beams scattered by successive layers was kept constant. Based on the polarization distribution theory, a calculation of X-ray scattering from interface roughness accounts for the typical features observed on the experimental curves.

Citation Download Citation

Jean-Pierre Chauvineau, Y. Chambet, and C. Marliere "Glancing-incidence x-ray scattering by multilayers for XUV mirrors", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192078

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