Optical behavior values of substrates, single films, and two film combinations in the x-ray region

Michele Wilson McColgan; Muamer Zukic; Jong Ho Park; Douglas G. Torr; Joseph Pedulla

doi:10.1117/12.212586

20 June 1995 Optical behavior values of substrates, single films, and two-film combinations in the x-ray region

Michele Wilson McColgan, Muamer Zukic, Jong Ho Park, Douglas G. Torr, Joseph Pedulla

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212586
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Optical constant determination of thin films is critical to the design of x-ray multilayers. In the x-ray region, surface roughness, interfacial roughness, interdiffusion, volume anisotropies, etc. all act to reduce the reflectance. Reflectance measurements were taken at NIST in Gaithersburg, MD. From these measurements the optical behavior results of a substrate, single films and two film combinations were determined by best fitting the measured reflectance values as a function of the angles of incidence with a functional form based on the theoretical reflectance as a function of the optical constants. By using these new optical constants in a multilayer design, the performance of a multilayer can be predicted.

Citation Download Citation

Michele Wilson McColgan, Muamer Zukic, Jong Ho Park, Douglas G. Torr, and Joseph Pedulla "Optical behavior values of substrates, single films, and two-film combinations in the x-ray region", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212586

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KEYWORDS

Reflectivity

Silicon

Molybdenum

X-rays

Multilayers

Glasses

Thin films

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