Optical behavior determination of thin film and bulk materials in the x-ray region

Michele M. Wilson; Muamer Zukic; Douglas G. Torr; Alphonsus John Fennelly; Edward L. Fry

doi:10.1117/12.193131

11 November 1994 Optical behavior determination of thin film and bulk materials in the x-ray region

Michele M. Wilson, Muamer Zukic, Douglas G. Torr, Alphonsus John Fennelly, Edward L. Fry

Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193131
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Optical constant determination of thin films is critical to the design of x-ray multilayers. In the x-ray region, surface roughness, interfacial roughness, interdiffusion, volume anisotropics, etc. all act to reduce the reflection. A method is described to include all imperfections that make a real film different from an ideal film into the `optical behavior' values for each individual layer and the multilayer as a whole. These `optical behavior' values can then be used to accurately predict the performance of the multilayer.

Citation Download Citation

Michele M. Wilson, Muamer Zukic, Douglas G. Torr, Alphonsus John Fennelly, and Edward L. Fry "Optical behavior determination of thin film and bulk materials in the x-ray region", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193131

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