Optical metrology for small zone measurement

Guan-chang Jin; Nai-Keng Bao; Po Sheun Chung

doi:10.1117/12.215625

2 August 1995 Optical metrology for small zone measurement

Guan-chang Jin, Nai-Keng Bao, Po Sheun Chung

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215625
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

A novel technique in optical metrology is developed for small zone measurement. The technique consists of a double lenses optical arrangement and an improved digital speckle correlation technique. This new method provides the possibility of high sensitivity for deformation measurements. A theoretical analysis and an experimental result confirmed that a 2 nm resolution can be realized. Some application examples are presented in the paper.

Citation Download Citation

Guan-chang Jin, Nai-Keng Bao, and Po Sheun Chung "Optical metrology for small zone measurement", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215625

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