Fast sparse aerial-image calculation for OPC

Nicolas B. Cobb; Avideh Zakhor

doi:10.1117/12.228208

8 December 1995 Fast sparse aerial-image calculation for OPC

Nicolas B. Cobb, Avideh Zakhor

Proceedings Volume 2621, 15th Annual BACUS Symposium on Photomask Technology and Management; (1995) https://doi.org/10.1117/12.228208
Event: 15th Annual BACUS Symposium on Photomask Technology and Management '95, 1995, Santa Clara, CA, United States

Abstract

Fast sparse aerial image simulation and its use in optical proximity correction (OPC) is the topic of this paper. The primary result is a new lookup table formulation of aerial image calculation for a partially coherent optical system. As a generalization of our previous work for Manhattan geometry, the new technique extends the fast lookup technique to arbitrary polygonal mask geometry. Using the new method, the computation required for a sample point of the image intensity is proportional to the number of polygon edges in the local mask region. Moreover, the method is particularly well suited for perturbations to the mask such as those OPC might produce. Our implementation of the new technique achieves intensity calculation speeds of 6 msec/point and perturbational update speeds of 26 microsecond(s) ec/point on a Sun SPARC 10.

Citation Download Citation

Nicolas B. Cobb and Avideh Zakhor "Fast sparse aerial-image calculation for OPC", Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); https://doi.org/10.1117/12.228208

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